Performance Improvement of Back-Channel-Etched a-IGZO TFTs by O2 Plasma Treatment

2018 9th Inthernational Conference on Computer Aided Design for Thin-Film Transistors (CAD-TFT) ◽

10.1109/cad-tft.2018.8608051 ◽

2018 ◽

Author(s):

Huan Yang ◽

Xiaoliang Zhou ◽

Shengdong Zhang ◽

Gongtan Li ◽

Shan Li

Keyword(s):

Plasma Treatment ◽

Performance Improvement

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Performance improvement for Metal/Al2O3/HfO2/SiO2/Si structure nonvolatile flash memory by fluorine plasma treatment

2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology ◽

10.1109/icsict.2012.6467578 ◽

2012 ◽

Author(s):

Chen-Jie Wang ◽

Zong-Liang Huo ◽

Ming Liu

Keyword(s):

Plasma Treatment ◽

Performance Improvement ◽

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Pre-Metal Dielectric Stress Engineering by a Novel Plasma Treatment and Integration Scheme for nMOS Performance Improvement

2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers. ◽

10.1109/vlsit.2006.1705254 ◽

2006 ◽

Author(s):

Y.-K. Jeong ◽

K. Roh ◽

K.-H. Kang ◽

Y.-H. Choi ◽

G.-H. Seo ◽

...

Keyword(s):

Plasma Treatment ◽

Performance Improvement ◽

Integration Scheme ◽

Stress Engineering

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Nitrogen-oxygen plasma treatment of ITO for performance improvement of blue organic light emitting diodes

Journal of the Korean Physical Society ◽

10.3938/jkps.62.486 ◽

2013 ◽

Vol 62 (3) ◽

pp. 486-489 ◽

Author(s):

Seongjong Kang ◽

Hwansool Oh ◽

Seokbeom Yoon

Keyword(s):

Plasma Treatment ◽

Performance Improvement ◽

Oxygen Plasma ◽

Light Emitting Diodes ◽

Organic Light Emitting Diodes ◽

Oxygen Plasma Treatment ◽

Light Emitting ◽

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InAs Quantum-Well MOSFET Performance Improvement by Using PEALD AlN Passivation Layer and In-Situ NH3 Post Remote-Plasma Treatment

10.7567/ssdm.2016.ps-6-01 ◽

2016 ◽

Author(s):

P.C. Chang ◽

Q.H. Luc ◽

G.Y. Lin ◽

C.C. Chang ◽

J.W. Lin ◽

...

Keyword(s):

Quantum Well ◽

Plasma Treatment ◽

Performance Improvement ◽

Passivation Layer ◽

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Performance Improvement of $\hbox{Sm}_{2}\hbox{O}_{3}$ MIM Capacitors by Using Plasma Treatment After Dielectric Formation

IEEE Electron Device Letters ◽

10.1109/led.2009.2030750 ◽

2009 ◽

Vol 30 (10) ◽

pp. 1033-1035 ◽

Author(s):

Jian-Jun Yang ◽

Jing-De Chen ◽

R. Wise ◽

P. Steinmann ◽

Yee-Chia Yeo ◽

...

Keyword(s):

Plasma Treatment ◽

Performance Improvement ◽

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Resistive switching performance improvement of InGaZnO-based memory device by nitrogen plasma treatment

Journal of Material Science and Technology ◽

10.1016/j.jmst.2020.01.049 ◽

2020 ◽

Vol 49 ◽

pp. 1-6 ◽

Author(s):

Li Zhang ◽

Zhong Xu ◽

Jia Han ◽

Lei Liu ◽

Cong Ye ◽

...

Keyword(s):

Plasma Treatment ◽

Performance Improvement ◽

Resistive Switching ◽

Memory Device ◽

Nitrogen Plasma ◽

Switching Performance

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Performance improvement of polycrystalline diamond ultraviolet photodetectors by room-temperature plasma treatment

Applied Physics Letters ◽

10.1063/1.1868862 ◽

2005 ◽

Vol 86 (9) ◽

pp. 093503 ◽

Author(s):

S. G. Wang ◽

P. J. Sellin ◽

A. Lohstroh ◽

Qing Zhang

Keyword(s):

Plasma Treatment ◽

Performance Improvement ◽

Room Temperature ◽

Polycrystalline Diamond ◽

Temperature Plasma ◽

Ultraviolet Photodetectors

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Performance Improvement of AlGaAs/GaAs QWIP by ${\rm NH}_{3}$ Plasma Treatment

IEEE Journal of Quantum Electronics ◽

10.1109/jqe.2012.2196412 ◽

2012 ◽

Vol 48 (7) ◽

pp. 922-926 ◽

Author(s):

Jheng-Han Lee ◽

Che-Yu Chang ◽

Chang-Hung Li ◽

Shih-Yen Lin ◽

Si-Chen Lee

Keyword(s):

Plasma Treatment ◽

Performance Improvement

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Performance improvement of poly-Si tunnel thin-film transistor by NH3 plasma treatment

Thin Solid Films ◽

10.1016/j.tsf.2016.02.063 ◽

2016 ◽

Vol 618 ◽

pp. 178-183 ◽

Author(s):

William Cheng-Yu Ma ◽

Yi-Hsuan Chen ◽

Zheng-Yi Lin ◽

Yao-Sheng Huang ◽

Bo-Siang Huang ◽

...

Keyword(s):

Thin Film ◽

Plasma Treatment ◽

Performance Improvement ◽

Thin Film Transistor

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Organic thin-film transistor performance improvement using ammonia (NH3) plasma treatment on the gate insulator surface

Solid-State Electronics ◽

10.1016/j.sse.2008.11.013 ◽

2009 ◽

Vol 53 (2) ◽

pp. 246-250 ◽

Author(s):

Ching-Lin Fan ◽

Tsung-Hsien Yang ◽

Ping-Cheng Chiu ◽

Cheng-Han Huang ◽

Cheng-I Lin

Keyword(s):

Thin Film ◽

Plasma Treatment ◽

Performance Improvement ◽

Thin Film Transistor ◽

Gate Insulator ◽

Organic Thin Film ◽

Organic Thin Film Transistor ◽

Insulator Surface

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