Effect of the graphitization level of the free carbon on the temperature sensitivity of silicon carbonitride‐based pressure sensors

2021 ◽  
Author(s):  
Yuxi Yu ◽  
Chenhao Huang ◽  
Jie Xu ◽  
Jian Zhu ◽  
Minghui Cong ◽  
...  
Keyword(s):  
Temperature Sensitivity ◽  
Pressure Sensors ◽  
Free Carbon ◽  
Silicon Carbonitride

A resonant high-pressure sensor based on dual cavities

2021 ◽  
Vol 31 (12) ◽  
pp. 124002
Author(s):  
Jie Yu ◽  
Yulan Lu ◽  
Deyong Chen ◽  
Junbo Wang ◽  
Jian Chen ◽  
...  
Keyword(s):  
High Pressure ◽  
Temperature Sensitivity ◽  
Pressure Sensor ◽  
Pressure Range ◽  
High Vacuum ◽  
Pressure Sensors ◽  
Anodic Bonding ◽  
Temperature Range ◽  
Pressure Sensitive ◽  
Ocean Sciences

Abstract High-pressure sensors enable expansive demands in ocean sciences, industrial controls, and oil explorations. Successful sensor realized in piezoresistive high-pressure sensors which suffer from the key issue of compromised accuracies due to serious temperature drifts. Herein, this paper presents a high accuracy resonant high-pressure sensor with the pressure range of 70 MPa. Different from conventional resonant high-pressure sensor, the developed sensor utilized a dual-resonator-cavity design to minimize temperature disturbances and improve the pressure sensitivities. Besides, four circle cavities were used to maintain a high vacuum level for resonators after anodic bonding process. In details, Dual resonators, which is parallelly placed in the tensile and compressive stresses areas of a rectangular pressure sensitive diaphragm, are separated vacuum-packaged in the parallel dual cavities. Thus, pressure under measurement bends the pressure sensitive diaphragm, producing an increased pressure sensitivity and a decreased temperature sensitivity by the differential outputs of the dual resonators. Parameterized mathematical models of the sensor were established and the parameters of the models were optimized to adjust the pressure sensitivities and the temperature sensitivities of the sensor. Simplified deep reactive ion etching was used to form the sensing structure of the sensor and only once anodic bonding was used to form vacuum packaging for the dual resonators. Experimental results confirmed that the Q values of the resonators were higher than 32 000. Besides, the temperature sensitivity of the sensor was reduced from 44 Hz °C−1 (494 ppm °C−1) to 1 Hz °C−1 (11 ppm °C−1) by the differential outputs of the dual resonators in the temperature range of −10 °C–60 °C under the pressure of 1000 kPa. In addition, the accuracy of the sensor was better than 0.02% FS within the pressure range of 110–6500 kPa and the temperature range of −10 °C–60 °C by using a polynomial algorithm.

scholarly journals Performance Evaluation of Honeywell Silicon Piezoresistive Pressure Transducers for Oceanographic and Limnological Measurements*

2005 ◽  
Vol 22 (12) ◽  
pp. 1933-1939 ◽  
Author(s):  
Vijay Kumar ◽  
Antony Joseph ◽  
R. G. Prabhudesai ◽  
S. Prabhudesai ◽  
Surekha Nagvekar ◽  
...  
Keyword(s):  
Temperature Sensitivity ◽  
Pressure Range ◽  
Effective Means ◽  
Pressure Sensors ◽  
Zero Point ◽  
Full Scale ◽  
Absolute Pressure ◽  
Pressure Transducers ◽  
Temperature Range ◽  
The Mean

Abstract Simultaneous calibrations of three temperature-compensated piezoresistive ruggedized precision “absolute” pressure transducers (Honeywell model PPTR0040AP5VB-BD), which have been designed specially for long-term coastal oceanographic and limnological measurements, have been carried out at four differing temperatures (10°, 20°, 30°, and 40°C) to evaluate their suitability for such applications. The full-scale pressure range of these shallow water absolute pressure sensors is ≈ 2800 hPa (equivalent to water depth of ≈ 18 m). Measurement results have been used to examine the transducers’ performance indicators, such as zero-point offset, accuracy, linearity, hysteresis, temperature sensitivity, and slope. Differing piezoresistive ruggedized precision absolute pressure transducers (PPTRs) exhibited differing zero-point offset values, ranging from 2 to −79 hPa. Temperature sensitivity of zero-point offset was ≈0.3 hPa over the temperature range 10°–40°C. The mean hysteresis over the full-scale absolute pressure range (≈2800 hPa) varied from approximately 2 to 8 hPa over the temperature range 10°–40°C. The slope of the least squares–fitted linear graph (taking the mean of ascending and descending pressures) was close to the ideal value of unity (deviation from 1 over the temperature range 10°–40°C was in the range of −0.001 to +0.005). Linearity was excellent, its mean over the entire pressure range being between ≈ −0.006% and 0.008% of full-scale (FS) over the above temperature range. The worst performance was exhibited at input pressures below ≈1500 hPa. Zero-point offset has played a significant role in deteriorating the accuracy of the PPTR, the mean accuracy (within ≈0.1% and −5%) having been exhibited by those transducers having offsets of 2 and −79 hPa, respectively. The mean accuracy exhibited temperature sensitivity of ≈1% in the range 10°–20°C and negligible sensitivity beyond 20°C. Use of a calibration equation significantly improved the mean static accuracy obtainable from the PPTR, to between −0.04% and 0.01% of FS. Evaluation results have indicated that a suitably calibrated temperature-compensated Honeywell PPTR provides an alternate cost-effective means for pressure measurements for coastal oceanographic and limnological studies.

High Temperature Sensitivity Pressure Sensors Based on Filter Paper as a Mold

2019 ◽  
Vol 166 (14) ◽  
pp. B1286-B1292 ◽  
Author(s):  
Congcong Yang ◽  
Xieraili Maimaitiyiming ◽  
Hongyu Mi
Keyword(s):  
High Temperature ◽  
Temperature Sensitivity ◽  
Filter Paper ◽  
Pressure Sensors ◽  
High Temperature Sensitivity

Structural Characterization of Silicon Carbonitride Ceramics from Polymeric Precursors using Nuclear Magnetic Resonance

1992 ◽  
Vol 287 ◽  
Author(s):  
Corine M. Gerardin ◽  
F. Taulelle ◽  
J. Livage
Keyword(s):  
Solid State Nmr ◽  
Magic Angle Spinning ◽  
Free Carbon ◽  
Silicon Carbonitride ◽  
Magic Angle ◽  
Chemical Analyses ◽  
Carbon Phase ◽  
Different Temperatures ◽  
Angle Spinning

ABSTRACTThe pyrolytic conversion of a polyvinylsilazane precursor to Si-C-N ceramics is studied using solid-state NMR. 13C and 29Si magic angle spinning and 1H static NMR experiments allow us to investigate the structure of the disordered multiphased intermediates formed during the pyrolysis. The Si environments are quantitatively analyzed by 29Si MAS NMR spectra simulations. The relative abundance of SiHCN2, SiC2N2, SiN3C and SiN4 sites at different temperatures are used to calculate elemental compositions that characterize the Si-containing phase. The comparison of these compositions with those obtained from chemical analyses shows evidence of the presence of a free carbon phase.We have also determined the H and C contents in the free carbon phase.

scholarly journals Study of the Sensing Characteristics of Irradiated Fiber Bragg Gratings and Fabry-Perot Interferometers Under Gamma Radiation

2021 ◽  
Author(s):  
Zhuoyue Li ◽  
Zengling Ran ◽  
Xianguo Qing ◽  
Zhengxi He ◽  
Yaqin Xiao ◽  
...  
Keyword(s):  
Gamma Radiation ◽  
Temperature Sensitivity ◽  
Pressure Sensors ◽  
Fiber Bragg Gratings ◽  
Bragg Gratings ◽  
Nuclear Radiation ◽  
Pressure Sensitivity ◽  
Fabry Perot ◽  
Fbg Sensors ◽  
Sensing Characteristics

AbstractThe sensing characteristics of irradiated fiber Bragg gratings (FBGs) and Fabry-Perot interferometers (FPIs) were investigated under a 2 MGy dose of gamma radiation. The study found that the pressure sensitivity of FP sensors after irradiation was stable, while the temperature sensitivity of FBG sensors was unstable, and both wavelengths displayed a shift. These findings offer the possibility for the application of FP pressure sensors in the gamma radiation environments, and FBG sensors require further research to be suitable for application in the nuclear radiation environments.

BRIEF-Primary Deposition of Grease-Free Carbon Black on Chopped Cotton Fibers

1952 ◽  
Vol 44 (5) ◽  
pp. 934-934
Author(s):  
W Hart ◽  
Jack Compton
Keyword(s):  
Carbon Black ◽  
Free Carbon ◽  
Cotton Fibers

Reticuloendothelial Function and Blood Coagulation in Rats

1969 ◽  
Vol 22 (03) ◽  
pp. 508-512
Author(s):  
L Pechet ◽  
Giselle S. Pechet ◽  
R. A MacDonald
Keyword(s):  
Blood Coagulation ◽  
Free Carbon ◽  
Colloidal Iron ◽  
Intravascular Coagulation ◽  
India Ink ◽  
Carbon Clearance

SummaryIntravascular coagulation and its possible effect on carbon clearance was studied in rats following the injection of commercial india ink containing shellac; a shellac-free carbon preparation; gelatin; heat denatured albumin; colloidal iron; and heparin. No relationship was found between activation of coagulation and RES function as measured by clearance of intravenously injected carbon.

Angepasste Signalverarbeitung für piezoresistive Drucksensoren (Well Adapted Signal Processing for Piezoresistive Pressure Sensors)

2003 ◽  
Vol 70 (5-2003) ◽  
pp. 258-264 ◽  
Author(s):  
Carsten Zahout ◽  
Roland Werthschützky
Keyword(s):  
Signal Processing ◽  
Pressure Sensors ◽  
Piezoresistive Pressure Sensors
Sign in / Sign up

Export Citation Format

Share Document