Computational thermodynamic study of SiC chemical vapor deposition from MTS‐H
2
*
1990 ◽
Vol 73
(6)
◽
pp. 1593-1598
◽
Keyword(s):
Keyword(s):
Thermodynamic study on the chemical vapor deposition of silicon nitride from the SiCl4–NH3–H2 system
2015 ◽
Vol 1051
◽
pp. 93-103
◽
Keyword(s):
2007 ◽
Vol 298
◽
pp. 367-371
◽
1995 ◽
Vol 53
◽
pp. 256-257
Keyword(s):
1989 ◽
Vol 47
◽
pp. 608-609
2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-885-Pr3-892
◽
Keyword(s):
2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-691-Pr3-702