Three-Dimensional Mixed Convection in a Horizontal Chemical Vapor Deposition Reactor

Journal of Heat Transfer ◽

10.1115/1.2910760 ◽

1993 ◽

Vol 115 (3) ◽

pp. 803-806 ◽

Author(s):

K. C. Karki ◽

P. S. Sathyamurthy ◽

S. V. Patankar

Keyword(s):

Chemical Vapor Deposition ◽

Mixed Convection ◽

Vapor Deposition ◽

Three Dimensional ◽

Chemical Vapor ◽

Chemical Vapor Deposition Reactor

Download Full-text

Heat and mass transfer characteristics of three-dimensional bell-shaped polysilicon chemical vapor deposition reactor

Journal of Thermal Analysis and Calorimetry ◽

10.1007/s10973-020-09465-6 ◽

2020 ◽

Vol 141 (1) ◽

pp. 323-335

Author(s):

Lisha An ◽

Xiangshu Lei ◽

Xin Qi ◽

Ming Fang ◽

Yingwen Liu

Keyword(s):

Mass Transfer ◽

Chemical Vapor Deposition ◽

Heat And Mass Transfer ◽

Vapor Deposition ◽

Three Dimensional ◽

Chemical Vapor ◽

Chemical Vapor Deposition Reactor ◽

Transfer Characteristics

Download Full-text

Radical and electron densities in a high plasma density-chemical vapor deposition reactor from a three-dimensional simulation

IEEE Transactions on Plasma Science ◽

10.1109/27.763037 ◽

1999 ◽

Vol 27 (1) ◽

pp. 62-63 ◽

Author(s):

E.R. Keiter ◽

M.J. Kushner

Keyword(s):

Chemical Vapor Deposition ◽

Plasma Density ◽

Vapor Deposition ◽

Three Dimensional ◽

Chemical Vapor ◽

High Plasma ◽

Electron Densities ◽

Chemical Vapor Deposition Reactor ◽

High Plasma Density ◽

Dimensional Simulation

Download Full-text

CHARACTERISTICS OF THREE-DIMENSIONAL FLOW, HEAT, AND MASS TRANSFER IN A CHEMICAL VAPOR DEPOSITION REACTOR

Numerical Heat Transfer Part A Applications ◽

10.1080/104077800274253 ◽

2000 ◽

Vol 37 (4) ◽

pp. 407-423 ◽

Author(s):

Kyoung-Woo Park, Hi-Yong Pak

Keyword(s):

Mass Transfer ◽

Chemical Vapor Deposition ◽

Heat And Mass Transfer ◽

Vapor Deposition ◽

Three Dimensional ◽

Chemical Vapor ◽

Three Dimensional Flow ◽

Chemical Vapor Deposition Reactor ◽

Dimensional Flow ◽

Download Full-text

Computation of three-dimensional flow and thermal fields in a model horizontal chemical vapor deposition reactor

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2006.05.049 ◽

2006 ◽

Vol 293 (2) ◽

pp. 475-484 ◽

Author(s):

T.S. Cheng ◽

M.C. Hsiao

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Three Dimensional ◽

Chemical Vapor ◽

Three Dimensional Flow ◽

Chemical Vapor Deposition Reactor ◽

Thermal Fields ◽

Dimensional Flow

Download Full-text

On multiple stability of mixed-convection flows in a chemical vapor deposition reactor

International Journal of Heat and Mass Transfer ◽

10.1016/s0017-9310(00)00121-6 ◽

2001 ◽

Vol 44 (3) ◽

pp. 659-672 ◽

Author(s):

Helmar van Santen ◽

Chris R. Kleijn ◽

Harry E.A. van den Akker

Keyword(s):

Chemical Vapor Deposition ◽

Mixed Convection ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Reactor ◽

Multiple Stability

Download Full-text

Numerical Study of a Three-Dimensional Chemical Vapor Deposition Reactor with Detailed Chemistry

Journal of Computational Physics ◽

10.1006/jcph.1996.0117 ◽

1996 ◽

Vol 126 (1) ◽

pp. 21-39 ◽

Author(s):

Alexandre Ern ◽

Vincent Giovangigli ◽

Mitchell D. Smooke

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Numerical Study ◽

Three Dimensional ◽

Chemical Vapor ◽

Detailed Chemistry ◽

Chemical Vapor Deposition Reactor

Download Full-text

Unsteady three-dimensional mixed convection in a heated horizontal channel with applications to chemical vapor deposition

International Journal of Heat and Mass Transfer ◽

10.1016/0017-9310(91)90215-z ◽

1991 ◽

Vol 34 (8) ◽

pp. 2039-2051 ◽

Author(s):

Greg Evans ◽

Ralph Greif

Keyword(s):

Chemical Vapor Deposition ◽

Mixed Convection ◽

Vapor Deposition ◽

Three Dimensional ◽

Chemical Vapor ◽

Horizontal Channel

Download Full-text

Optimization of Deposition Parameters for Thin Silicon Films on Flexible Substrates in a Hot-Wire Chemical Vapor Deposition Reactor

Materials Science Forum ◽

10.4028/www.scientific.net/msf.514-516.475 ◽

2006 ◽

Vol 514-516 ◽

pp. 475-482 ◽

Author(s):

Pedro Alpuim ◽

M. Ribeiro ◽

Sergej Filonovich

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Films ◽

Flexible Substrates ◽

Hot Wire ◽

Chemical Vapor Deposition Reactor ◽

Deposition Parameters ◽

Download Full-text

The Effect of Thermophoresis on Particle Deposition in a Tungsten Low Pressure Chemical Vapor Deposition Reactor

Journal of The Electrochemical Society ◽

10.1149/1.1392026 ◽

1999 ◽

Vol 146 (8) ◽

pp. 2901-2905 ◽

Author(s):

B. S. MacGibbon ◽

A. A. Busnaina ◽

B. Fardi

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Particle Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Chemical Vapor Deposition Reactor ◽

Pressure Chemical

Download Full-text

Particle Dynamics in a Chemical Vapor Deposition Reactor: A Multiscale Approach

Industrial & Engineering Chemistry Research ◽

10.1021/ie8015522 ◽

2009 ◽

Vol 48 (13) ◽

pp. 5969-5974 ◽

Author(s):

Yousef Sharifi ◽

Luke Achenie

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Particle Dynamics ◽

Multiscale Approach ◽

Chemical Vapor Deposition Reactor

Download Full-text