Dynamic Error Characterization for Non-Contact Dimensional Inspection Systems

2008 ◽  
Vol 130 (5) ◽  
Author(s):  
Vijay Srivatsan ◽  
Reuven Katz ◽  
Debasish Dutta ◽  
Bartosz Powałka
Keyword(s):  
High Precision ◽  
Measurement Errors ◽  
Dynamic Error ◽  
Dimensional Inspection ◽  
Position Errors ◽  
Error Characterization ◽  
Inspection Systems ◽  
Motion Speed ◽  
Dynamic Errors ◽  
Precision Motion

High-precision non-contact dimensional inspection systems typically utilize high-precision motion stages to manipulate the sensor. Such motion stages are susceptible to position errors, which need to be characterized. While geometric and thermal errors can be characterized and compensated, compensation of dynamic errors is a challenging task. This paper presents a method for dynamic error characterization that is significantly different from dynamic error characterization on contact-based systems. A mathematical model to translate the vibrations on the sensor to the measurement errors on the part is presented. Through experiments on a four-axis system, a relationship between sensor motion speed, sampling frequency, and measurement accuracy is derived. The results of the experiments are used to describe the selection of optimal operating parameters for best accuracy and least uncertainty.

Ultra‐Sensitive and Stretchable Ionic Skins for High‐Precision Motion Monitoring

2021 ◽  
pp. 2010199
Author(s):  
Jeong Hui Kim ◽  
Kyung Gook Cho ◽  
Dae Hyun Cho ◽  
Kihyon Hong ◽  
Keun Hyung Lee
Keyword(s):  
High Precision ◽  
Precision Motion

scholarly journals Compensation of Hysteresis in Hybrid Reluctance Actuator for High-Precision Motion

2019 ◽  
Vol 52 (15) ◽  
pp. 477-482 ◽  
Author(s):  
Francesco Cigarini ◽  
Shingo Ito ◽  
Julian Konig ◽  
Andreas Sinn ◽  
Georg Schitter
Keyword(s):  
High Precision ◽  
Precision Motion

Ultrasonic Positioning Using Curve-Fitting Extrapolation and Redundant Information Fusion

2011 ◽  
Vol 105-107 ◽  
pp. 1851-1855 ◽  
Author(s):  
Li Bin Lu ◽  
Ding Xin Chen ◽  
Guo Dong Jin ◽  
Rong Ming Li ◽  
Ying Jie Gao
Keyword(s):  
High Precision ◽  
Information Fusion ◽  
Curve Fitting ◽  
Measurement Errors ◽  
Redundant Information ◽  
Control Measurement

To study the problem of high precision, the reason why error appears in the ultrasonic positioning process is analyzed. To decrease the effect of error, this paper raises the algorithm of curve-fitting extrapolation and redundant information fusion. The experiment and contrast on precision between this algorithm and other classical ones demonstrate that, the new algorithm could effectively control measurement errors and raise the precision of ultrasonic positioning.

A Large Range Compliant Nano-Manipulator Supporting Electron Beam Lithography

2022 ◽  
pp. 1-48
Author(s):  
Yijie Liu ◽  
Zhen Zhang
Keyword(s):  
Electron Beam ◽  
Natural Frequency ◽  
High Precision ◽  
Electron Beam Lithography ◽  
Optimization Design ◽  
Large Range ◽  
Direct Write ◽  
Motion Stage ◽  
Cross Axis ◽  
Precision Motion

Abstract Electron beam lithography (EBL) is an important lithographic process of scanning a focused electron beam (e-beam) to direct write a custom pattern with nanometric accuracy. Due to the very limited field of the focused election beam, a motion stage is needed to move the sample to the e-beam field for processing large patterns. In order to eliminate the stitching error induced by the existing “step and scan” process, we in this paper propose a large range compliant nano-manipulator so that the manipulator and the election beam can be moved in a simultaneous manner. We also present an optimization design for the geometric parameters of the compliant manipulator under the vacuum environment. Experimental results demonstrate 1 mm × 1 mm travel range with high linearity, ~ 0.5% cross-axis error and 5 nm resolution. Moreover, the high natural frequency (~ 56 Hz) of the manipulator facilitates it to achieve high-precision motion of EBL.

Measurement Errors in 632.8 nm High Precision Phase-Shifting Fizeau Interferometer

2010 ◽  
Vol 47 (4) ◽  
pp. 041202
Author(s):  
魏豪明 Wei Haoming ◽  
邢廷文 Xing Tingwen ◽  
李云 Li Yun ◽  
刘志祥 Liu Zhixiang
Keyword(s):  
High Precision ◽  
Measurement Errors ◽  
Phase Shifting ◽  
Fizeau Interferometer ◽  
Precision Phase

scholarly journals Tracking Testing of Dynamic Errors for Linear Guideway Based on Position Sensitive Detector

2011 ◽  
Vol 2-3 ◽  
pp. 362-365
Author(s):  
Da Zhong Guo ◽  
Yuan Yuan Zou ◽  
Si Jun Zhu ◽  
Ming Yang Zhao
Keyword(s):  
Measurement Errors ◽  
High Speed ◽  
Two Dimensions ◽  
Position Sensitive Detector ◽  
Detection Accuracy ◽  
Sensitive Detector ◽  
Motion Stability ◽  
Measurement Results ◽  
Dynamic Errors ◽  
Position Sensitive

The dynamic precision of linear guideway is very important performance for mechatronic equipments. The dynamic errors for the linear guideway of machine tools can reduce machining precision. In according with the advantage of high-speed response, high detection accuracy and non-contact measurement, position sensitive detector (PSD) is widely used in industrial dynamic measurement. In this paper an approach for measuring the motion stability based on PSD is proposed. The measurement system based on PSD is designed and the measurement errors are analyzed. The measurement results show the approach can measure accurately the motion stability of guideway in two dimensions with features of high precision.

Calibration and Compensation of Dynamic Abbe Errors of a Coordinate Measuring Machine

2017 ◽  
Vol 140 (5) ◽  
Author(s):  
Daocheng Yuan ◽  
Xin Tao ◽  
Caijun Xie ◽  
Huiying Zhao ◽  
Dongxu Ren ◽  
...  
Keyword(s):  
Error Compensation ◽  
Dynamic Error ◽  
Coordinate Measuring Machine ◽  
Calibration Method ◽  
Local Dynamic ◽  
Operational Parameters ◽  
Dynamic Errors ◽  
Measuring Machine ◽  
Reducing Costs ◽  
Improving Accuracy

Error compensation technology is used for improving accuracy and reducing costs. Dynamic error compensation techniques of coordinate measuring machine (CMM) are still under study; the major problem is a lack of suitable models, which would be able to correctly and simply relate the dynamic errors with the structural and operational parameters. To avoid the complexity of local dynamic deformation measurement and modeling, a comprehensive calibration method is employed. Experimental research reveals specific qualities of dynamic Abbe errors; the results exceed the scope of ISO 10360-2 calibration method, showing the ISO 10360-2 dynamic error evaluation deficiencies. For calibrating the dynamic Abbe errors, the differential measurement method is presented based on the measurements of the internal and external dimensions. Referring probe tip radius correction, the dynamic Abbe errors compensation method is proposed for CMM end-users and is easy to use.

Sign in / Sign up

Export Citation Format

Share Document