Femtosecond Two-Photon 3D Lightfield Lithography

2021 ◽  
Author(s):  
Aravind Jakkinapalli ◽  
Balaji Baskar ◽  
Sy-Bor Wen
Keyword(s):  
Spatial Light Modulator ◽  
Light Field ◽  
Single Photon ◽  
Microlens Array ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Virtual Image ◽  
Light Modulator ◽  
Two Photon ◽  
Uv Led

Abstract Based on the successful single-photon 3D light field photolithography we demonstrated in the last year, we extend the methodology to femtosecond 3D light field lithography. Compared with our previous single-photon work with UV LED light, using femtosecond light and the associated two-photon light absorption in 3D light field lithography can cure photoresist only around designed voxel locations in a 3D space. Such a two-photon scheme can prevent the unwilling curing of photoresists along the optical paths of rays before arriving at designed voxel locations, which is observed in our previous UV LED-based single-photon 3D light field lithography. The experimental scheme of femtosecond two-photon 3D light field lithography starts from delivering uniform femtosecond laser pulses to a spatial light modulator. The designed pixel map is presented on the spatial light modulator and then delivered to a microlens array to construct a 3D virtual image in the free space. By compressing the 3D virtual image in a photoresist layer with a microscope system, we can successfully generate different microscale 3D patterns without relying on scanning processes as in traditional 3D lithography. In this study, we present preliminary results of (a) algorithms developed to generated 3D patterns with femtosecond light, which should satisfy additional constraints when femtosecond light is used, and (b) 3D patterns generated in photoresists with femtosecond two-photon 3D light field lithography.

Picosecond Single-Photon and Femtosecond Two-Photon Pulsed Laser Stimulation for IC Characterization and Failure Analysis

2009 ◽  
Author(s):  
V. Pouget ◽  
E. Faraud ◽  
K. Shao ◽  
S. Jonathas ◽  
D. Horain ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Single Photon ◽  
Pulsed Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Ultrashort Laser Pulses ◽  
Laser Stimulation ◽  
Two Photon ◽  
Resolution Improvement ◽  
Ultrashort Laser

Abstract This paper presents the use of pulsed laser stimulation with picosecond and femtosecond laser pulses. We first discuss the resolution improvement that can be expected when using ultrashort laser pulses. Two case studies are then presented to illustrate the possibilities of the pulsed laser photoelectric stimulation in picosecond single-photon and femtosecond two-photon modes.

scholarly journals Поляризованная флуоресценция молекул NADH при двухфотонном возбуждении фемтосекундными лазерными импульсами с длиной волны 720-780 nm

2019 ◽  
Vol 45 (13) ◽  
pp. 37
Author(s):  
М.Э. Сасин ◽  
И.А. Горбунова ◽  
Н.O. Безверхний ◽  
Я.М. Бельтюков ◽  
J. Rubayo-Soneira ◽  
...  
Keyword(s):  
Aqueous Solution ◽  
Single Photon ◽  
Laser Pulses ◽  
Time Correlation ◽  
Femtosecond Laser Pulses ◽  
Diffusion Time ◽  
Methanol Solution ◽  
Polarized Fluorescence ◽  
Two Photon ◽  
Photon Excitation

The decay of polarized fluorescence in coenzyme NADH upon two-photon excitation by femtosecond laser pulses at the wavelength range of 720- 780 nm in water/methanol solution has been investigated. Decay fluorescence times tau_1 and tau_2, rotation diffusion time tau_rot, and preexponential factors a_1/a_2 ratio have been determined from experiment. The results obtained have been compared with previous results in NADH in aqueous solution. polarized fluorescence, NADH, adenine, nicotinamide, spectroscopy, time correlation single photon spectroscopy

3D Light Field Projection and the Associate 3D Photolithography

2020 ◽  
Author(s):  
Sy-Bor Wen ◽  
Hongjie Zhang
Keyword(s):  
Femtosecond Laser ◽  
Light Field ◽  
Uv Light ◽  
Microlens Array ◽  
Photon Absorption ◽  
Virtual Image ◽  
Two Photon Absorption ◽  
Two Photon ◽  
3D Surface ◽  
3D Surface Topography

Abstract 3D light field camera has been provided as a valid method to capture 3D surface topography with a microlens array. Through inverting the propagation direction, 3D virtual image projection can also be achieved with conventional optics and a microlens array. By compressing the 3D virtual image from the microlens array with an additional lens, microscale 3D virtual image can be achieved. We propose that microscale 3D virtual image can be valuable in microscale 3D fabrication. In this study, we provide a theoretical basis to combine femtosecond laser with the above mentioned 3D virtual image reconstruction scheme to cure photopolymers. With multiphoton effects induced by femtosecond laser, we expect 3D patterning of regions inside the photopolymer can be possible. Compared with the demonstration of 3D patterning with continuous near UV light and the proposed 3D light field projection scheme, curing of photopolymer can be limited to focal points (i.e., voxel) of the projected microscale 3D surface with two photon absorption effect when femtosecond light with high enough intensity is applied. The required femtosecond light intensity is also determined in this study. We expect this new 3D photolithography method can be valuable in fast and high precision patterning of micro to macro structures in materials that are photoactive.

Inorganic-organic Hybrid Materials for Real 3-D Sub-νm Lithography

2003 ◽  
Vol 780 ◽  
Author(s):  
R. Houbertz ◽  
J. Schulz ◽  
L. Fröhlich ◽  
G. Domann ◽  
M. Popall ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Sol Gel ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Hybrid Polymer ◽  
Organic Hybrid ◽  
Two Photon ◽  
Applied Technology ◽  
Scale Structures ◽  
Sol Gel Synthesis

AbstractReal 3-D sub-νm lithography was performed with two-photon polymerization (2PP) using inorganic-organic hybrid polymer (ORMOCER®) resins. The hybrid polymers were synthesized by hydrolysis/polycondensation reactions (modified sol-gel synthesis) which allows one to tailor their material properties towards the respective applications, i.e., dielectrics, optics or passivation. Due to their photosensitive organic functionalities, ORMOCER®s can be patterned by conventional photo-lithography as well as by femtosecond laser pulses at 780 nm. This results in polymerized (solid) structures where the non-polymerized parts can be removed by conventional developers.ORMOCER® structures as small as 200 nm or even below were generated by 2PP of the resins using femtosecond laser pulses. It is demonstrated that ORMOCER®s have the potential to be used in components or devices built up by nm-scale structures such as, e.g., photonic crystals. Aspects of the materials in conjunction to the applied technology are discussed.

High power supercontinuum generation by dual-color femtosecond laser pulses in fused silica

2021 ◽  
Author(s):  
Saba Zafar ◽  
Dong-Wei Li ◽  
Acner Camino ◽  
Jun-Wei Chang ◽  
Zuo-Qiang Hao
Keyword(s):  
Femtosecond Laser ◽  
High Power ◽  
Microlens Array ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Fused Silica ◽  
Spectral Energy ◽  
Phase Matching ◽  
Fundamental Wavelength ◽  
Fundamental Laser

Abstract High power supercontinuum (SC) is generated by focusing 800 nm and 400 nm femtosecond laser pulses in fused silica with a microlens array. It is found that the spectrum of the SC is getting broader compared with the case of single laser pulse, and the spectral energy density between the two fundamental laser wavelengths is getting significantly higher by optimizing the phase matching angle of the BBO. It exceeds μJ/nm over 490 nm range which is from 380 nm to 870 nm, overcoming the disadvantage of relative lower power in the ranges far from fundamental wavelength.

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