Direct-Write Fabrication of Microchannel in Epoxy Matrix
This paper describes the fabrication of microchannels by direct-write assembly and their integration into CMOS circuit technologies. A robotic apparatus was used to deposit a fugitive ink filament on glass and CMOS chip substrates. An epoxy and a nanocomposite matrix were both used to enclose the ink which was subsequently removed under heat and pressure in order to form a microchannel. Here, we demonstrate the fabrication of a microchannel by direct-write assembly on top of a CMOS chip for potential laboratory-on-chip applications such as bioparticle detection and manipulation.
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2009 ◽
Vol 3
(4)
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pp. 212-219
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Keyword(s):
2007 ◽
Vol 134
(1)
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pp. 27-36
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1993 ◽
Vol 04
(04)
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pp. 351-358
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Keyword(s):
2009 ◽
Vol 86
(10)
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pp. 2104-2109
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