Pressure Considerations Associated with Ion Sampling from Low-Pressure Glow Discharges

Journal of Vacuum Science and Technology ◽

10.1116/1.1316580 ◽

1972 ◽

Vol 9 (1) ◽

pp. 27-27

Author(s):

J. W. Coburn ◽

E. Kay

Keyword(s):

Low Pressure ◽

Glow Discharges

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Emission characteristics of mixed gas plasmas in low-pressure glow discharges

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/s0584-8547(01)00184-7 ◽

2001 ◽

Vol 56 (5) ◽

pp. 465-486 ◽

Author(s):

Kazuaki Wagatsuma

Keyword(s):

Low Pressure ◽

Emission Characteristics ◽

Mixed Gas ◽

Glow Discharges

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Experimental investigations of glow discharges in hollow cathode geometries at low pressure

IEEE Transactions on Plasma Science ◽

10.1109/tps.2005.845929 ◽

2005 ◽

Vol 33 (2) ◽

pp. 384-385 ◽

Author(s):

T. Callegari ◽

F. Gegot ◽

L.C. Pitchford ◽

J. Galy ◽

J.P. Boeuf

Keyword(s):

Hollow Cathode ◽

Low Pressure ◽

Experimental Investigations ◽

Glow Discharges

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Study on Effect of Neutral Gas Pressure on Plasma Characteristics in Capacitive RF Argon Glow Discharges at Low Pressure by Fluid Modeling

IEEE Transactions on Plasma Science ◽

10.1109/tps.2018.2818164 ◽

2018 ◽

Vol 46 (5) ◽

pp. 1738-1746 ◽

Author(s):

Tagra Samir ◽

Yue Liu ◽

Lulu Zhao

Keyword(s):

Low Pressure ◽

Gas Pressure ◽

Fluid Modeling ◽

Neutral Gas ◽

Glow Discharges ◽

Plasma Characteristics

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Fluid modeling of plasma dynamics in pulsed RF capacitive glow discharges in low pressure argon

Physics of Plasmas ◽

10.1063/1.4997615 ◽

2017 ◽

Vol 24 (8) ◽

pp. 083515 ◽

Keyword(s):

Low Pressure ◽

Plasma Dynamics ◽

Fluid Modeling ◽

Glow Discharges ◽

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Secondary ion mass spectrometry measurements of deuterium penetration into silicon by low pressure RF glow discharges

Radiation Effects and Defects in Solids ◽

10.1080/10420158908213004 ◽

1989 ◽

Vol 111-112 (1-2) ◽

pp. 299-308 ◽

Author(s):

Gottlieb S. Oehrlein ◽

Gerald J. Scilla

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Low Pressure ◽

Glow Discharges ◽

Ion Mass Spectrometry ◽

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Simulation of the shielding of dust particles in low pressure glow discharges

Applied Physics Letters ◽

10.1063/1.109440 ◽

1993 ◽

Vol 62 (18) ◽

pp. 2197-2199 ◽

Author(s):

Seung J. Choi ◽

Mark J. Kushner

Keyword(s):

Low Pressure ◽

Dust Particles ◽

Glow Discharges

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Chemical kinetics in low pressure acetylene radio frequency glow discharges

Journal of Applied Physics ◽

10.1063/1.366333 ◽

1997 ◽

Vol 82 (10) ◽

pp. 4763-4771 ◽

Author(s):

James R. Doyle

Keyword(s):

Radio Frequency ◽

Chemical Kinetics ◽

Low Pressure ◽

Glow Discharges

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Electron acoustic waves in capacitively coupled, low-pressure rf glow discharges

Physical Review Letters ◽

10.1103/physrevlett.66.1469 ◽

1991 ◽

Vol 66 (11) ◽

pp. 1469-1472 ◽

Author(s):

M. Surendra ◽

D. B. Graves

Keyword(s):

Acoustic Waves ◽

Low Pressure ◽

Capacitively Coupled ◽

Electron Acoustic Waves ◽

Glow Discharges ◽

Electron Acoustic

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A particle-in-cell simulation of dust charging and shielding in low pressure glow discharges

IEEE Transactions on Plasma Science ◽

10.1109/27.279017 ◽

1994 ◽

Vol 22 (2) ◽

pp. 138-150 ◽

Author(s):

S.J. Choi ◽

M.J. Kushner

Keyword(s):

Low Pressure ◽

Particle In Cell ◽

Glow Discharges ◽

Cell Simulation ◽

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A kinetic model for low-pressure glow discharges in the presence of dust particles

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/30/1/014 ◽

1997 ◽

Vol 30 (1) ◽

pp. 113-118 ◽

Author(s):

De-Zhen Wang ◽

J Q Dong ◽

S M Mahajan

Keyword(s):

Kinetic Model ◽

Low Pressure ◽

Dust Particles ◽

Glow Discharges

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