Quantitative comparison between Auger electron spectroscopy and secondary ion mass spectroscopy depth profiles of a double layer structure of AlAs in GaAs using the mixing-roughness-information depth model

2001 ◽  
Vol 19 (4) ◽  
pp. 1111-1115 ◽  
Author(s):  
S. Hofmann ◽  
A. Rar ◽  
D. W. Moon ◽  
K. Yoshihara
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