Determination and application of the depth resolution function in sputter profiling with secondary ion mass spectroscopy and Auger electron spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581239 ◽

1998 ◽

Vol 16 (3) ◽

pp. 1096-1102 ◽

Author(s):

Siegfried Hofmann ◽

Johannes Schubert

Keyword(s):

Auger Electron Spectroscopy ◽

Mass Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Depth Resolution ◽

Resolution Function ◽

Secondary Ion Mass Spectroscopy ◽

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Chemistry of Metal and Alloy Adherends by Secondary Ion Mass Spectroscopy, Ion Scattering Spectroscopy, and Auger Electron Spectroscopy

Surface Analysis Techniques for Metallurgical Applications ◽

10.1520/stp39064s ◽

2009 ◽

pp. 86-86-15

Author(s):

WL Baun ◽

NT McDevitt ◽

JS Solomon

Keyword(s):

Auger Electron Spectroscopy ◽

Mass Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Ion Scattering ◽

Secondary Ion Mass Spectroscopy ◽

Ion Scattering Spectroscopy ◽

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Grain boundary and interdiffusion studies in compound semiconductor thin films and devices utilizing Auger electron spectroscopy and secondary ion mass spectroscopy

Thin Solid Films ◽

10.1016/0040-6090(79)90413-9 ◽

1979 ◽

Vol 57 (1) ◽

pp. 99-106 ◽

Author(s):

L.L. Kazmerski

Keyword(s):

Grain Boundary ◽

Auger Electron Spectroscopy ◽

Mass Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Compound Semiconductor ◽

Secondary Ion Mass Spectroscopy ◽

Semiconductor Thin Films ◽

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Adhesion enhancement of magnetron-sputtered copper films by ion bombardment etching treatment of nickel and Inconel substrates: investigations by Auger electron spectroscopy and secondary ion mass spectroscopy of the ion beam effects

Journal of Adhesion Science and Technology ◽

10.1163/156856191x00891 ◽

1991 ◽

Vol 5 (11) ◽

pp. 987-999 ◽

Author(s):

M. Cahoreau ◽

G.H. Lee ◽

J. Caisso ◽

M. Cailler

Keyword(s):

Auger Electron Spectroscopy ◽

Mass Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Ion Beam ◽

Ion Bombardment ◽

Copper Films ◽

Secondary Ion Mass Spectroscopy ◽

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A preliminary study of pure metal surfaces using Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS) and Secondary Ion Mass Spectroscopy (SIMS)

Surface Science ◽

10.1016/0039-6028(75)90160-0 ◽

1975 ◽

Vol 53 (1) ◽

pp. 636-648 ◽

Author(s):

M. Gettings ◽

J.P. Coad

Keyword(s):

Auger Electron Spectroscopy ◽

Mass Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Secondary Ion Mass Spectroscopy ◽

X Ray ◽

Preliminary Study ◽

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Mass spectroscopy of recoiled ions, secondary ion mass spectroscopy, and Auger electron spectroscopy investigation of Y2O3-stabilized ZrO2(100) and (110)

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581668 ◽

1999 ◽

Vol 17 (3) ◽

pp. 939-944 ◽

Author(s):

G. S. Herman ◽

M. A. Henderson ◽

K. A. Starkweather ◽

E. P. McDaniel

Keyword(s):

Auger Electron Spectroscopy ◽

Mass Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Secondary Ion Mass Spectroscopy ◽

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The study of hydrogen segregation on Zr(0001) and Zr(1010) surfaces by static secondary ion mass spectroscopy, work function, Auger electron spectroscopy and nuclear reaction analysis

Journal of Alloys and Compounds ◽

10.1016/0925-8388(95)01847-6 ◽

1995 ◽

Vol 231 (1-2) ◽

pp. 354-363 ◽

Author(s):

C.-S. Zhang ◽

B. Li ◽

P.R. Norton

Keyword(s):

Auger Electron Spectroscopy ◽

Work Function ◽

Nuclear Reaction ◽

Mass Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Nuclear Reaction Analysis ◽

Secondary Ion Mass Spectroscopy ◽

Hydrogen Segregation ◽

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Evidence for the segregation of impurities to grain boundaries in multigrained silicon using Auger electron spectroscopy and secondary ion mass spectroscopy

Applied Physics Letters ◽

10.1063/1.91479 ◽

1980 ◽

Vol 36 (4) ◽

pp. 323-325 ◽

Author(s):

L. L. Kazmerski ◽

P. J. Ireland ◽

T. F. Ciszek

Keyword(s):

Auger Electron Spectroscopy ◽

Grain Boundaries ◽

Mass Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Secondary Ion Mass Spectroscopy ◽

Secondary Ion ◽

Segregation Of Impurities

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Effect of heating on the behaviors of hydrogen in C-TiC films with auger electron spectroscopy and secondary ion mass spectroscopy analyses

Thin Solid Films ◽

10.1016/j.tsf.2007.01.011 ◽

2007 ◽

Vol 515 (13) ◽

pp. 5524-5527 ◽

Author(s):

Y. Zou ◽

L.W. Wang ◽

N.K. Huang

Keyword(s):

Auger Electron Spectroscopy ◽

Mass Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Secondary Ion Mass Spectroscopy ◽

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Auger electron spectroscopy and secondary-ion mass spectroscopy study of interdiffusion in gold-bismuth oxide and aluminium-bismuth oxide thin films

Journal of Materials Science Materials in Electronics ◽

10.1007/bf00703038 ◽

1992 ◽

Vol 3 (4) ◽

pp. 257-262 ◽

Author(s):

K. B. Sundaram ◽

A. L. Grogan ◽

S. S. Seshan

Keyword(s):

Auger Electron Spectroscopy ◽

Mass Spectroscopy ◽

Bismuth Oxide ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

Oxide Thin Films ◽

Secondary Ion Mass Spectroscopy ◽

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Quantitative comparison between Auger electron spectroscopy and secondary ion mass spectroscopy depth profiles of a double layer structure of AlAs in GaAs using the mixing-roughness-information depth model

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1345899 ◽

2001 ◽

Vol 19 (4) ◽

pp. 1111-1115 ◽

Author(s):

S. Hofmann ◽

A. Rar ◽

D. W. Moon ◽

K. Yoshihara

Keyword(s):

Auger Electron Spectroscopy ◽

Mass Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Layer Structure ◽

Quantitative Comparison ◽

Depth Profiles ◽

Double Layer Structure ◽

Information Depth ◽

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