Effect of catalyst on growth behavior of carbon nanotube synthesizing by microwave heating thermal chemical vapor deposition process

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1375818 ◽

2001 ◽

Vol 19 (3) ◽

pp. 1026 ◽

Author(s):

Shi-Cheng Chen ◽

Liang-Yuan Shih ◽

Yu-Chen Chang ◽

George-C Tu ◽

I-Nan Lin

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Microwave Heating ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Growth Behavior ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Vapor Deposition Process

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Effect of catalyst on growth behavior of carbon nanotubes synthesized by microwave heating thermal chemical vapor deposition process

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1531150 ◽

2003 ◽

Vol 21 (1) ◽

pp. 400 ◽

Author(s):

Hsiu-Fung Cheng ◽

Yen Chuo ◽

Chen-Shien Chou ◽

Jin-Hua Huang ◽

Kuo-Shung Liu ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Microwave Heating ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Growth Behavior ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Vapor Deposition Process

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Carbon nanotubes, nanofilaments and nanobeads by thermal chemical vapor deposition process

Materials Science and Engineering B ◽

10.1016/s0921-5107(02)00309-4 ◽

2002 ◽

Vol 96 (1) ◽

pp. 24-28 ◽

Author(s):

Debabrata Pradhan ◽

Maheshwar Sharon

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Vapor Deposition Process

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Enhanced Straylight Suppression of Short Carbon Nanotubes by using Platinum Silicide Catalyst Enhancer in Rapid Thermal Chemical Vapor Deposition Process

Applied Surface Science ◽

10.1016/j.apsusc.2021.152250 ◽

2021 ◽

pp. 152250

Author(s):

H.M. Iftekhar Jaim ◽

John G. Hagopian

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Platinum Silicide ◽

Short Carbon ◽

Vapor Deposition Process

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Hafnium oxide gate stack prepared by in situ rapid thermal chemical vapor deposition process for advanced gate dielectrics

Journal of Applied Physics ◽

10.1063/1.1500420 ◽

2002 ◽

Vol 92 (5) ◽

pp. 2807-2809 ◽

Author(s):

S. J. Lee ◽

T. S. Jeon ◽

D. L. Kwong ◽

R. Clark

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Hafnium Oxide ◽

Gate Dielectrics ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Vapor Deposition Process

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Growth and microstructures of carbon nanotube films prepared by microwave plasma enhanced chemical vapor deposition process

Thin Solid Films ◽

10.1016/j.tsf.2006.05.009 ◽

2006 ◽

Vol 515 (4) ◽

pp. 1552-1560 ◽

Author(s):

Sanjay K. Srivastava ◽

V.D. Vankar ◽

V. Kumar

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process ◽

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Theoretical modeling of temperature dependent catalyst-assisted growth of conical carbon nanotube tip by plasma enhanced chemical vapor deposition process

Physics of Plasmas ◽

10.1063/1.4906876 ◽

2015 ◽

Vol 22 (2) ◽

pp. 023505 ◽

Author(s):

Aarti Tewari ◽

Suresh C. Sharma

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Theoretical Modeling ◽

Chemical Vapor Deposition Process ◽

Temperature Dependent ◽

Vapor Deposition Process

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Growth and properties of vertically well-aligned GaN nanowires by thermal chemical vapor deposition process

Materials Letters ◽

10.1016/j.matlet.2010.11.041 ◽

2011 ◽

Vol 65 (4) ◽

pp. 763-765 ◽

Author(s):

S.M. Kang ◽

B.K. Kang ◽

D.H. Yoon

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Gan Nanowires ◽

Vapor Deposition Process

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Single-Wall Carbon Nanotube Film Grown by Advanced Ethanol Chemical Vapor Deposition Process

Journal of Nanoelectronics and Optoelectronics ◽

10.1166/jno.2012.1226 ◽

2012 ◽

Vol 7 (1) ◽

pp. 99-101 ◽

Author(s):

A. A. Tonkikh ◽

A. S. Pozharov ◽

N. R. Arutyunyan ◽

I. V. Anoshkin ◽

E. I. Kauppinen ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Single Wall Carbon Nanotube ◽

Single Wall Carbon ◽

Carbon Nanotube Film ◽

Vapor Deposition Process

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Synthesis of three-dimensional carbon nanotube/graphene hybrid materials by a two-step chemical vapor deposition process

Carbon ◽

10.1016/j.carbon.2015.01.051 ◽

2015 ◽

Vol 86 ◽

pp. 358-362 ◽

Author(s):

Wenlin Zhang ◽

Huanhuan Xie ◽

Rufan Zhang ◽

Muqiang Jian ◽

Chunya Wang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Hybrid Materials ◽

Vapor Deposition ◽

Three Dimensional ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Detection of Intermediates in Thermal Chemical Vapor Deposition Process Using Tetraethoxysilane

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.3339 ◽

1994 ◽

Vol 33 (Part 1, No. 6A) ◽

pp. 3339-3342 ◽

Author(s):

Tetsuya Satake ◽

Tetsuji Sorita ◽

Hirofumi Fujioka ◽

Hiroshi Adachi ◽

Hiroyuki Nakajima

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Vapor Deposition Process

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