Growth and microstructures of carbon nanotube films prepared by microwave plasma enhanced chemical vapor deposition process

Carbon Nanotube ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Vapor Deposition Process ◽

Nanotube Films

Growth of carbon nanotubes using microwave plasma-enhanced chemical vapor deposition process

Materials Chemistry and Physics ◽

10.1016/s0254-0584(03)00314-6 ◽

2003 ◽

Vol 82 (3) ◽

pp. 571-574 ◽

Cited By ~ 7

Author(s):

Ruo-Mei Liu ◽

Jyh-Ming Ting

Keyword(s):

Carbon Nanotubes ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Surface roughness of SiO[sub 2] from a remote microwave plasma enhanced chemical vapor deposition process

10.1116/1.590144 ◽

1998 ◽

Vol 16 (4) ◽

pp. 2165 ◽

Cited By ~ 8

Author(s):

M. J. Rack

Keyword(s):

Surface Roughness ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Theoretical modeling of temperature dependent catalyst-assisted growth of conical carbon nanotube tip by plasma enhanced chemical vapor deposition process

Physics of Plasmas ◽

10.1063/1.4906876 ◽

2015 ◽

Vol 22 (2) ◽

pp. 023505 ◽

Cited By ~ 1

Author(s):

Aarti Tewari ◽

Suresh C. Sharma

Keyword(s):

Carbon Nanotube ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Theoretical Modeling ◽

Temperature Dependent ◽

Single-Wall Carbon Nanotube Film Grown by Advanced Ethanol Chemical Vapor Deposition Process

Journal of Nanoelectronics and Optoelectronics ◽

10.1166/jno.2012.1226 ◽

2012 ◽

Vol 7 (1) ◽

pp. 99-101 ◽

Cited By ~ 6

Author(s):

A. A. Tonkikh ◽

A. S. Pozharov ◽

N. R. Arutyunyan ◽

I. V. Anoshkin ◽

E. I. Kauppinen ◽

...

Keyword(s):

Carbon Nanotube ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Single Wall Carbon Nanotube ◽

Single Wall Carbon ◽

Carbon Nanotube Film ◽

Synthesis of three-dimensional carbon nanotube/graphene hybrid materials by a two-step chemical vapor deposition process

Carbon ◽

10.1016/j.carbon.2015.01.051 ◽

2015 ◽

Vol 86 ◽

pp. 358-362 ◽

Cited By ~ 30

Author(s):

Wenlin Zhang ◽

Huanhuan Xie ◽

Rufan Zhang ◽

Muqiang Jian ◽

Chunya Wang ◽

...

Keyword(s):

Carbon Nanotube ◽

Hybrid Materials ◽

Vapor Deposition ◽

Three Dimensional ◽

Chemical Vapor ◽

Deposition Process ◽

Catalytic size control of multiwalled carbon nanotube diameter in xylene chemical vapor deposition process

Inorganica Chimica Acta ◽

10.1016/j.ica.2004.08.022 ◽

2004 ◽

Vol 357 (13) ◽

pp. 3920-3926 ◽

Cited By ~ 12

Author(s):

Nitin Chopra ◽

Bruce Hinds

Keyword(s):

Carbon Nanotube ◽

Vapor Deposition ◽

Size Control ◽

Chemical Vapor ◽

Deposition Process ◽

Multiwalled Carbon Nanotube ◽

Multiwalled Carbon ◽

Modeling of the carbon nanotube chemical vapor deposition process using methane and acetylene precursor gases

Nanotechnology ◽

10.1088/0957-4484/19/16/165607 ◽

2008 ◽

Vol 19 (16) ◽

pp. 165607 ◽

Cited By ~ 15

Author(s):

Andrew C Lysaght ◽

Wilson K S Chiu

Keyword(s):

Carbon Nanotube ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Control of product nature and morphology by adjusting the hydrogen content in a continuous chemical vapor deposition process for carbon nanotube synthesis

Carbon ◽

10.1016/j.carbon.2016.05.060 ◽

2016 ◽

Vol 107 ◽

pp. 171-179 ◽

Cited By ~ 18

Author(s):

Yang Ma ◽

Anthony B. Dichiara ◽

Delong He ◽

Laurent Zimmer ◽

Jinbo Bai

Keyword(s):

Carbon Nanotube ◽

Hydrogen Content ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Carbon Nanotube Synthesis ◽

Continuous Chemical ◽

Coating of Diamond-Like Carbon Nanofilm on Alumina by Microwave Plasma Enhanced Chemical Vapor Deposition Process

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2012.5384 ◽

2012 ◽

Vol 12 (1) ◽

pp. 642-647 ◽

Cited By ~ 2

Author(s):

Chotiwan Rattanasatien ◽

Nattaporn Tonanon ◽

Worawan Bhanthumnavin ◽

Boonchoat Paosawatyanyong

Keyword(s):

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Diamond Like Carbon ◽

One-step fabrication of high quality double-walled carbon nanotube thin films by a chemical vapor deposition process

Carbon ◽

10.1016/j.carbon.2010.06.046 ◽

2010 ◽

Vol 48 (13) ◽

pp. 3817-3824 ◽

Cited By ~ 47

Author(s):

Jian-Min Feng ◽

Rui Wang ◽

Ya-Li Li ◽

Xiao-Hua Zhong ◽

Lan Cui ◽

...

Keyword(s):

Thin Films ◽

Carbon Nanotube ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

High Quality ◽

One Step ◽