Discharge mode transitions in low-frequency inductively coupled plasmas with internal oscillating current sheets
2005 ◽
Vol 23
(3)
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pp. 440-447
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Keyword(s):
2002 ◽
Vol 20
(1)
◽
pp. 251-264
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Keyword(s):
Keyword(s):
2009 ◽
Vol 19
(1)
◽
pp. 015011
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Keyword(s):
2005 ◽
Vol 33
(2)
◽
pp. 240-241
◽
Keyword(s):
Keyword(s):