Spectroscopic study of gas and surface phase chemistries of CF4 plasmas in an inductively coupled modified gaseous electronics conference reactor
2006 ◽
Vol 24
(1)
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pp. 114-125
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Keyword(s):
1996 ◽
Vol 14
(2)
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pp. 634-638
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Keyword(s):
1977 ◽
Vol 17
(2)
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pp. 237-246
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2005 ◽
Vol 23
(6)
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pp. 1657-1667
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1995 ◽
Vol 100
(4)
◽
pp. 427
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Keyword(s):