Electrical characterization of an inductively coupled gaseous electronics conference reference cell

Journal of Applied Physics ◽

10.1063/1.3000667 ◽

2008 ◽

Vol 104 (8) ◽

pp. 083303 ◽

Author(s):

S. V. Singh ◽

C. Pargmann

Keyword(s):

Electrical Characterization ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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Electrical characterization of radio‐frequency discharges in the Gaseous Electronics Conference Reference Cell

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577783 ◽

1992 ◽

Vol 10 (6) ◽

pp. 3550-3562 ◽

Author(s):

Mark A. Sobolewski

Keyword(s):

Radio Frequency ◽

Electrical Characterization ◽

Reference Cell ◽

Radio Frequency Discharges ◽

Gaseous Electronics Conference

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Particle trapping, transport, and charge in capacitively and inductively coupled argon plasmas in a Gaseous Electronics Conference Reference Cell

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580158 ◽

1996 ◽

Vol 14 (2) ◽

pp. 634-638 ◽

Author(s):

S. M. Collins ◽

D. A. Brown ◽

J. F. O’Hanlon ◽

R. N. Carlile

Keyword(s):

Particle Trapping ◽

Reference Cell ◽

Inductively Coupled ◽

Argon Plasmas ◽

Gaseous Electronics Conference

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Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

Applied Physics Letters ◽

10.1063/1.2362599 ◽

2006 ◽

Vol 89 (16) ◽

pp. 161501 ◽

Author(s):

S. V. Singh ◽

P. Kempkes ◽

H. Soltwisch

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Transition Region ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Mode Transition ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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Optical and electrical characterization of pulse-modulated argon atmospheric-pressure inductively coupled microplasma jets

Journal of Applied Physics ◽

10.1063/1.3499272 ◽

2010 ◽

Vol 108 (8) ◽

pp. 083302 ◽

Author(s):

Satomi Tajima ◽

Masashi Matsumori ◽

Shigeki Nakatsuka ◽

Shouichi Tsuchiya ◽

Takanori Ichiki

Keyword(s):

Atmospheric Pressure ◽

Electrical Characterization ◽

Inductively Coupled

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Plasma Diagnostics in an Inductively Coupled Plasma - Gaseous Electronics Conference Reference Cell

ECS Transactions ◽

10.1149/1.2956051 ◽

2019 ◽

Vol 14 (1) ◽

pp. 365-373

Author(s):

Andre M. Daltrini ◽

Stanislav A. Moshkalev ◽

Thomas Morgan ◽

Robert Piejak ◽

William Graham

Keyword(s):

Plasma Diagnostics ◽

Inductively Coupled Plasma ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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Radiometric and electrical characterization of medium-power inductively coupled uv-radiation source

2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) ◽

10.1109/plasma.2014.7012612 ◽

2014 ◽

Author(s):

Karsten Haehre ◽

Celal Mohan Oeguen ◽

Rainer Kling

Keyword(s):

Uv Radiation ◽

Radiation Source ◽

Electrical Characterization ◽

Inductively Coupled

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An Inductively-Coupled Plasma Source for the Gaseous Electronics Conference Rf Reference Cell

Journal of Research of the National Institute of Standards and Technology ◽

10.6028/jres.100.032 ◽

1995 ◽

Vol 100 (4) ◽

pp. 427 ◽

Author(s):

P.A. Miller ◽

G.A. Hebner ◽

K.E. Greenberg ◽

P.D. Pochan ◽

B.P. Aragon

Keyword(s):

Inductively Coupled Plasma ◽

Plasma Source ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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In situFourier transform infrared characterization of the plasma chemistry in varying pulsed cycles of a 1,3-butadiene discharge in an inductively coupled gaseous electronics conference cell

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2141618 ◽

2006 ◽

Vol 24 (1) ◽

pp. 126-132 ◽

Author(s):

A. K. Jindal ◽

A. J. Prengler ◽

L. J. Overzet ◽

M. J. Goeckner

Keyword(s):

Plasma Chemistry ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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CHEMICAL AND ELECTRICAL CHARACTERIZATION OF POLYCRYSTALLINE SEMICONDUCTORS

Le Journal de Physique Colloques ◽

10.1051/jphyscol:1982124 ◽

1982 ◽

Vol 43 (C1) ◽

pp. C1-171-C1-185 ◽

Author(s):

L. L. Kazmerski ◽

P. E. Russell

Keyword(s):

Electrical Characterization ◽

Polycrystalline Semiconductors

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Structural and Electrical Characterization of Shaped Beam Laser Recrystallized Polysilicon on Amorphous Substrates

MRS Proceedings ◽

10.1557/proc-4-499 ◽

1981 ◽

Vol 4 ◽

Author(s):

T. J. Stultz ◽

J. F. Gibbons

Keyword(s):

Electrical Characterization ◽

Grain Structure ◽

Electrical Characteristics ◽

Shaped Beam ◽

Cw Laser ◽

Amorphous Substrates ◽

ABSTRACTStructural and electrical characterization of laser recrystallized LPCVD silicon films on amorphous substrates using a shaped cw laser beam have been performed. In comparing the results to data obtained using a circular beam, it was found that a significant increase in grain size can be achieved and that the surface morphology of the shaped beam recrystallized material was much smoother. It was also found that whereas circular beam recrystallized material has a random grain structure, shaped beam material is highly oriented with a <100> texture. Finally the electrical characteristics of the recrystallized film were very good when measured in directions parallel to the grain boundaries.

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