Plasma Diagnostics in an Inductively Coupled Plasma - Gaseous Electronics Conference Reference Cell

ECS Transactions ◽

10.1149/1.2956051 ◽

2019 ◽

Vol 14 (1) ◽

pp. 365-373

Author(s):

Andre M. Daltrini ◽

Stanislav A. Moshkalev ◽

Thomas Morgan ◽

Robert Piejak ◽

William Graham

Keyword(s):

Plasma Diagnostics ◽

Inductively Coupled Plasma ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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An Inductively-Coupled Plasma Source for the Gaseous Electronics Conference Rf Reference Cell

Journal of Research of the National Institute of Standards and Technology ◽

10.6028/jres.100.032 ◽

1995 ◽

Vol 100 (4) ◽

pp. 427 ◽

Author(s):

P.A. Miller ◽

G.A. Hebner ◽

K.E. Greenberg ◽

P.D. Pochan ◽

B.P. Aragon

Keyword(s):

Inductively Coupled Plasma ◽

Plasma Source ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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Particle trapping, transport, and charge in capacitively and inductively coupled argon plasmas in a Gaseous Electronics Conference Reference Cell

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580158 ◽

1996 ◽

Vol 14 (2) ◽

pp. 634-638 ◽

Author(s):

S. M. Collins ◽

D. A. Brown ◽

J. F. O’Hanlon ◽

R. N. Carlile

Keyword(s):

Particle Trapping ◽

Reference Cell ◽

Inductively Coupled ◽

Argon Plasmas ◽

Gaseous Electronics Conference

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Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

Applied Physics Letters ◽

10.1063/1.2362599 ◽

2006 ◽

Vol 89 (16) ◽

pp. 161501 ◽

Author(s):

S. V. Singh ◽

P. Kempkes ◽

H. Soltwisch

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Transition Region ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Mode Transition ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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Electrical characterization of an inductively coupled gaseous electronics conference reference cell

Journal of Applied Physics ◽

10.1063/1.3000667 ◽

2008 ◽

Vol 104 (8) ◽

pp. 083303 ◽

Author(s):

S. V. Singh ◽

C. Pargmann

Keyword(s):

Electrical Characterization ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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A low-power oxygen inductively coupled plasma for spectrochemical analysis-II. Plasma diagnostics

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(89)80109-0 ◽

1989 ◽

Vol 44 (11) ◽

pp. 1093-1107 ◽

Author(s):

Pengyuan Yang ◽

Ramon M. Barnes

Keyword(s):

Low Power ◽

Plasma Diagnostics ◽

Inductively Coupled Plasma ◽

Spectrochemical Analysis ◽

Inductively Coupled

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Spatially resolved, intracavity absorption for inductively coupled plasma diagnostics

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(85)80063-x ◽

1985 ◽

Vol 40 (7) ◽

pp. 927-932 ◽

Author(s):

S.W. Downey ◽

G.L. Keaton ◽

N.S. Nogar

Keyword(s):

Plasma Diagnostics ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

Spatially Resolved

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Plasma Diagnostics in Inductively Coupled Plasma Etching Using Cl2/Xe

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.1435 ◽

2000 ◽

Vol 39 (Part 1, No. 3A) ◽

pp. 1435-1436 ◽

Author(s):

Akihiro Matsutani ◽

Hideo Ohtsuki ◽

Fumio Koyama ◽

Kenichi Iga

Keyword(s):

Plasma Etching ◽

Plasma Diagnostics ◽

Inductively Coupled Plasma ◽

Inductively Coupled Plasma Etching ◽

Inductively Coupled

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Estimating measurement error values resulting from the peak position error, when using the Abel inversion and the numerical method in argon inductively coupled plasma diagnostics

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/s0584-8547(99)00144-5 ◽

1999 ◽

Vol 54 (13) ◽

pp. 1899-1902 ◽

Author(s):

Susumu Nakamura

Keyword(s):

Measurement Error ◽

Numerical Method ◽

Plasma Diagnostics ◽

Inductively Coupled Plasma ◽

Peak Position ◽

Position Error ◽

Abel Inversion ◽

Inductively Coupled

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Determination of Ultra-Trace Scandium, Yttrium and Rare-Earth Elements in High-Purity Iron by High-Resolution Inductively Coupled Plasma-Mass Spectrometry

Matériaux & Techniques ◽

10.1051/mattech/200391120031s ◽

2003 ◽

Vol 91 ◽

pp. 31-36 ◽

Author(s):

Tetsuya Ashino ◽

Kunio Takada ◽

Kazuaki Wagatsuma ◽

Kenji Abiko

Keyword(s):

Mass Spectrometry ◽

High Resolution ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

Plasma Mass Spectrometry ◽

Purity Iron ◽

High Purity Iron ◽

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Potential novel diagnostic applications of laser ablation inductively coupled plasma mass spectrometry in trace metal imaging of hepatic metal disorders

Zeitschrift für Gastroenterologie ◽

10.1055/s-0033-1360941 ◽

2014 ◽

Vol 52 (01) ◽

Author(s):

R Weiskirchen ◽

R Uerlings ◽

A Zimmermann ◽

JS Becker

Keyword(s):

Mass Spectrometry ◽

Laser Ablation ◽

Trace Metal ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

Plasma Mass Spectrometry ◽

Diagnostic Applications

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