Fabrication of thin-film silicon on insulator by separation by implanted oxygen layer transfer

2008 ◽  
Vol 26 (6) ◽  
pp. L45-L47 ◽  
Author(s):  
Xing Wei ◽  
Ai Min Wu ◽  
Meng Chen ◽  
Jing Chen ◽  
Miao Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Silicon On Insulator ◽  
Layer Transfer ◽  
Oxygen Layer ◽  
Thin Film Silicon

Leakage current models of thin film silicon-on-insulator devices

1998 ◽  
Vol 72 (10) ◽  
pp. 1199-1201 ◽  
Author(s):  
Hank Shin ◽  
Stella Hong ◽  
Tom Wetteroth ◽  
Syd R. Wilson ◽  
Dieter K. Schroder
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Silicon On Insulator ◽  
Thin Film Silicon

Investigation on Silicon on Insulator Fabricated by Separation by Implanted Oxygen Layer Transfer

2010 ◽  
Vol 157 (1) ◽  
pp. H81 ◽  
Author(s):  
Xing Wei ◽  
Aimin Wu ◽  
Xiang Wang ◽  
Xianyuan Li ◽  
Fei Ye ◽  
...  
Keyword(s):  
Silicon On Insulator ◽  
Layer Transfer ◽  
Oxygen Layer

ChemInform Abstract: Novel Approach to Defect Etching in Thin Film Silicon-on-Insulator.

ChemInform ◽  
2010 ◽  
Vol 24 (42) ◽  
pp. no-no
Author(s):  
H. GASSEL ◽  
J. PETER-WEIDEMANN ◽  
H. VOGT
Keyword(s):  
Thin Film ◽  
Silicon On Insulator ◽  
Thin Film Silicon ◽  
Novel Approach

ULSI-quality gate oxide on thin-film-silicon-on-insulator

2002 ◽  
Author(s):  
W.M. Huang ◽  
Z.J. Ma ◽  
M. Racanelli ◽  
D. Hughes ◽  
S. Ajuria ◽  
...  
Keyword(s):  
Thin Film ◽  
Gate Oxide ◽  
Silicon On Insulator ◽  
Thin Film Silicon

Thin film silicon on insulator substrates and their application to integrated circuits

1996 ◽  
Vol 25 (1) ◽  
pp. 13-21 ◽  
Author(s):  
S. R. Wilson ◽  
T. Wetteroth ◽  
S. Hong ◽  
H. Shin ◽  
B. Y. Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Integrated Circuits ◽  
Silicon On Insulator ◽  
Thin Film Silicon
Sign in / Sign up

Export Citation Format

Share Document