Fabrication of high quality factor photonic crystal microcavities in InAsP∕InP membranes combining reactive ion beam etching and reactive ion etching
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1994 ◽
Vol 23
(4)
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pp. 363-367
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2004 ◽
Vol 22
(3)
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pp. 875
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2014 ◽
Vol 32
(1)
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pp. 011204
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