Grazing incidence x-ray fluorescence and secondary ion mass spectrometry combined approach for the characterization of ultrashallow arsenic distribution in silicon

Author(s):  
G. Pepponi ◽  
D. Giubertoni ◽  
M. Bersani ◽  
F. Meirer ◽  
D. Ingerle ◽  
...  
2001 ◽  
Vol 31 (8) ◽  
pp. 724-733 ◽  
Author(s):  
Caren D. Tidwell ◽  
David G. Castner ◽  
Stephen L. Golledge ◽  
Buddy D. Ratner ◽  
Klaus Meyer ◽  
...  

RSC Advances ◽  
2016 ◽  
Vol 6 (84) ◽  
pp. 80649-80654 ◽  
Author(s):  
Wenjing Xie ◽  
Kai Mo Ng ◽  
Lu-Tao Weng ◽  
Chi-Ming Chan

Hydrogenated graphite powder was obtained through Birch reduction of graphite powder and characterized by X-ray photoelectron spectroscopy (XPS) and time-of-flight secondary ion mass spectrometry (ToF-SIMS) at 500 °C.


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