Ultralow energy boron implants in silicon characterization by nonoxidizing secondary ion mass spectrometry analysis and soft x-ray grazing incidence x-ray fluorescence techniques

Author(s):  
Damiano Giubertoni ◽  
Erica Iacob ◽  
P. Hoenicke ◽  
B. Beckhoff ◽  
Giancarlo Pepponi ◽  
...  
2015 ◽  
Vol 87 (15) ◽  
pp. 7795-7802 ◽  
Author(s):  
Rainer Kassenböhmer ◽  
Felix Draude ◽  
Martin Körsgen ◽  
Andreas Pelster ◽  
Heinrich F. Arlinghaus

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