Ultrashallow Boron Junctions in Silicon Characterization by Secondary Ion Mass Spectrometry and Synchrotron Radiation Grazing Incidence X-Ray Fluorescence Techniques

Author(s):  
Lluís Yedra ◽  
C. N. Shyam Kumar ◽  
Alisa Pshenova ◽  
Esther Lentzen ◽  
Patrick Philipp ◽  
...  

The study demonstrates a new method to quantify Secondary Ion Mass Spectrometry (SIMS) images by using a synergetic combination of Energy Dispersive X-ray spectroscopy (EDX) and SIMS.


2014 ◽  
Vol 59 (2) ◽  
pp. 173-180 ◽  
Author(s):  
Bianca Kyriacou ◽  
Katie L. Moore ◽  
David Paterson ◽  
Martin D. de Jonge ◽  
Daryl L. Howard ◽  
...  

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