Inductively coupled plasma etching of high aspect ratio two-dimensional photonic crystals in Al-rich AlGaAs and AlGaAsSb

2011 ◽  
Vol 29 (2) ◽  
pp. 021006 ◽  
Author(s):  
A. Larrue ◽  
D. Belharet ◽  
P. Dubreuil ◽  
S. Bonnefont ◽  
O. Gauthier-Lafaye ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Photonic Crystals ◽  
Plasma Etching ◽  
High Aspect Ratio ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching

2004 ◽  
Vol 95 (5) ◽  
pp. 2242-2245 ◽  
Author(s):  
F. Pommereau ◽  
L. Legouézigou ◽  
S. Hubert ◽  
S. Sainson ◽  
J.-P. Chandouineau ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Low Loss ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

scholarly journals Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal

2007 ◽  
Vol 56 (2) ◽  
pp. 977
Author(s):  
Ma Xiao-Tao ◽  
Zheng Wan-Hua ◽  
Ren Gang ◽  
Fan Zhong-Chao ◽  
Chen Liang-Hui
Keyword(s):  
Photonic Crystal ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled
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