Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal

Two Dimensional ◽

Conference Proceedings. 14th Indium Phosphide and Related Materials Conference (Cat. No.02CH37307) ◽

Fabrication of two-dimensional InP photonic band-gap structures using inductively coupled plasma etching

10.1109/iciprm.2002.1014459 ◽

2003 ◽

Cited By ~ 1

Author(s):

A. Djoudi ◽

L. Legouezigou ◽

S. Hubert ◽

S. Sainson ◽

C. Moussant ◽

...

Keyword(s):

Band Gap ◽

Plasma Etching ◽

Photonic Band Gap ◽

Two Dimensional ◽

Inductively Coupled ◽

Photonic Band Gap Structures ◽

Photonic Band

Fabrication of high-aspect-ratio double-slot photonic crystal waveguide in InP heterostructure by inductively coupled plasma etching using ultra-low pressure

AIP Advances ◽

10.1063/1.4793082 ◽

2013 ◽

Vol 3 (2) ◽

pp. 022122 ◽

Cited By ~ 5

Author(s):

Kaiyu Cui ◽

Yongzhuo Li ◽

Xue Feng ◽

Yidong Huang ◽

Wei Zhang

Keyword(s):

Photonic Crystal ◽

Aspect Ratio ◽

Plasma Etching ◽

High Aspect Ratio ◽

Low Pressure ◽

Photonic Crystal Waveguide ◽

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

Inductively coupled plasma etching of GaAs suspended photonic crystal cavities

10.1116/1.3154519 ◽

2009 ◽

Vol 27 (4) ◽

pp. 1909 ◽

Cited By ~ 13

Author(s):

R. Braive ◽

L. Le Gratiet ◽

S. Guilet ◽

G. Patriarche ◽

A. Lemaı̂tre ◽

...

Keyword(s):

Photonic Crystal ◽

Plasma Etching ◽

Photonic Crystal Cavities ◽

Optimization of inductively coupled plasma etching for low nanometer scale air-hole arrays in two-dimensional GaAs-based photonic crystals

Journal of Semiconductors ◽

10.1088/1674-4926/31/1/012003 ◽

2010 ◽

Vol 31 (1) ◽

pp. 012003 ◽

Cited By ~ 1

Author(s):

Peng Yinsheng ◽

Ye Xiaoling ◽

Xu Bo ◽

Jin Peng ◽

Niu Jiebin ◽

...

Keyword(s):

Photonic Crystals ◽

Plasma Etching ◽

Nanometer Scale ◽

Two Dimensional ◽

Inductively Coupled ◽

Hole Arrays ◽

Air Hole

Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl/sub 2/

International Conference on Indium Phosphide and Related Materials, 2005. ◽

10.1109/iciprm.2005.1517542 ◽

2005 ◽

Author(s):

C.F. Caristrom ◽

R. van der Heijden ◽

A.A.M. Kok ◽

R.W. van der Heijden ◽

F. Karouta ◽

...

Keyword(s):

Photonic Crystal ◽

Plasma Etching ◽

Fabrication of Indium Phosphide Compound Photonic Crystal by Hydrogen Iodide/Xenon Inductively Coupled Plasma Etching

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.l1400 ◽

2004 ◽

Vol 43 (No. 11A) ◽

pp. L1400-L1402 ◽

Cited By ~ 7

Author(s):

Masayuki Fujita ◽

Atsushi Sugitatsu ◽

Toshitsugu Uesugi ◽

Susumu Noda

Keyword(s):

Photonic Crystal ◽

Indium Phosphide ◽

Plasma Etching ◽

Hydrogen Iodide ◽

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

Inductively coupled plasma etching of high aspect ratio two-dimensional photonic crystals in Al-rich AlGaAs and AlGaAsSb

10.1116/1.3549125 ◽

2011 ◽

Vol 29 (2) ◽

pp. 021006 ◽

Cited By ~ 8

Author(s):

A. Larrue ◽

D. Belharet ◽

P. Dubreuil ◽

S. Bonnefont ◽

O. Gauthier-Lafaye ◽

...

Keyword(s):

Aspect Ratio ◽

Photonic Crystals ◽

Plasma Etching ◽

High Aspect Ratio ◽

Two Dimensional ◽

Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching

Journal of Applied Physics ◽

10.1063/1.1644630 ◽

2004 ◽

Vol 95 (5) ◽

pp. 2242-2245 ◽

Cited By ~ 57

Author(s):

F. Pommereau ◽

L. Legouézigou ◽

S. Hubert ◽

S. Sainson ◽

J.-P. Chandouineau ◽

...

Keyword(s):

Photonic Crystals ◽

Plasma Etching ◽

Two Dimensional ◽

Low Loss ◽

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

Effect of sidewall passivation in BCl[sub 3]∕N[sub 2] inductively coupled plasma etching of two-dimensional GaAs photonic crystals

10.1116/1.3205004 ◽

2009 ◽

Vol 27 (5) ◽

pp. L21 ◽

Cited By ~ 20

Author(s):

Kirill A. Atlasov ◽

Pascal Gallo ◽

Alok Rudra ◽

Benjamin Dwir ◽

Eli Kapon

Keyword(s):

Photonic Crystals ◽

Plasma Etching ◽

Two Dimensional ◽

Inductively Coupled ◽

Sidewall Passivation

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

Fabrication of high quality factor GaAs/InAsSb photonic crystal microcavities by inductively coupled plasma etching and fast wet etching

10.1116/1.4836517 ◽

2014 ◽

Vol 32 (1) ◽

pp. 011204 ◽

Cited By ~ 6

Author(s):

Iván Prieto González ◽

Luis Enrique Muñoz Camuñez ◽

Alfonso González Taboada ◽

Carmen Robles Urdiales ◽

Jose María Ripalda Cobián ◽

...

Keyword(s):

Photonic Crystal ◽

Quality Factor ◽

Plasma Etching ◽

Wet Etching ◽

High Quality Factor ◽

High Quality ◽

Inductively Coupled ◽

Photonic Crystal Microcavities