Fabrication of high-aspect-ratio double-slot photonic crystal waveguide in InP heterostructure by inductively coupled plasma etching using ultra-low pressure
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pp. 022122
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Yongzhuo Li
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Xue Feng
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Yidong Huang
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Wei Zhang
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pp. 2351
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N. Sultana
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Tim P. LaFave
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Duncan L. MacFarlane
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Haiping Zhou
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...
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Vol 29
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pp. 020601
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L. Gatilova
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S. Bouchoule
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S. Guilet
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G. Patriarche
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Vol 29
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pp. 021006
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A. Larrue
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D. Belharet
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P. Dubreuil
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S. Bonnefont
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...
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pp. 1896-1902
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Wei Zhou
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N. Sultana
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Vol 56
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Zheng Wan-Hua
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Ren Gang
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Fan Zhong-Chao
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Chen Liang-Hui
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Erica A. Douglas
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Jeffrey Stevens
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Kira Fishgrab
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Christine Ford
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Randy J. Shul
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...
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Vol 27
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pp. 1909
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R. Braive
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L. Le Gratiet
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S. Guilet
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G. Patriarche
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R. van der Heijden
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Vol 4
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pp. 34-39
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