Enhancement of spatial resolution in generating point spread functions by Monte Carlo simulation in electron-beam lithography
2011 ◽
Vol 29
(6)
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pp. 06F902
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2011 ◽
Vol 497
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pp. 127-132
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1988 ◽
Vol 6
(6)
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pp. 2033
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Keyword(s):
1998 ◽
Vol 41-42
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pp. 175-178
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1992 ◽
Vol 50
(1)
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pp. 386-387
Keyword(s):
2014 ◽
Vol 121
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pp. 142-146
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Keyword(s):
1975 ◽
Vol 12
(6)
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pp. 1305-1308
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Keyword(s):