Theoretical study of the ultimate resolution in electron beam lithography by Monte Carlo simulation, including secondary electron generation: Energy dissipation profile in polymethylmethacrylate
2012 ◽
Vol 55
(23-24)
◽
pp. 7188-7198
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Keyword(s):
2011 ◽
Vol 497
◽
pp. 127-132
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2009 ◽
Vol 55
(4)
◽
pp. 1720-1723
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Keyword(s):
1988 ◽
Vol 6
(6)
◽
pp. 2033
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Keyword(s):