Low resistance and thermally stable Ti/Al-based Ohmic contacts to N-face n-GaN for vertical light-emitting diodes by using Ti(Ga) solid solution and TiN layers

Author(s):  
Joon-Woo Jeon ◽  
Woong-Sun Yum ◽  
Tae-Yeon Seong ◽  
Sang Youl Lee ◽  
June-O Song
2003 ◽  
Vol 83 (24) ◽  
pp. 4990-4992 ◽  
Author(s):  
June-O Song ◽  
Dong-Seok Leem ◽  
J. S. Kwak ◽  
O. H. Nam ◽  
Y. Park ◽  
...  

2004 ◽  
Vol 201 (12) ◽  
pp. 2823-2826 ◽  
Author(s):  
Dong-Seok Leem ◽  
June-O. Song ◽  
J. S. Kwak ◽  
J. Cho ◽  
H. Kim ◽  
...  

2008 ◽  
Vol 44 (6) ◽  
pp. 735-741 ◽  
Author(s):  
Kang-Won Kim ◽  
Hyun-Gi Hong ◽  
June-O Song ◽  
Joon-Ho Oh ◽  
Tae-Yeon Seong

2012 ◽  
Vol 12 (1) ◽  
pp. 225-227 ◽  
Author(s):  
Joon-Woo Jeon ◽  
Sang Youl Lee ◽  
June O. Song ◽  
Tae-Yeon Seong

2005 ◽  
Vol 86 (10) ◽  
pp. 102102 ◽  
Author(s):  
Dong-Seok Leem ◽  
June-O Song ◽  
Woong-Ki Hong ◽  
Jeong-Tae Maeng ◽  
J. S. Kwak ◽  
...  

2005 ◽  
Vol 8 (11) ◽  
pp. G320 ◽  
Author(s):  
Woong-Ki Hong ◽  
June-O Song ◽  
Hyun-Gi Hong ◽  
Keun-Yong Ban ◽  
Takhee Lee ◽  
...  

2010 ◽  
Vol 48 (5) ◽  
pp. 456-461
Author(s):  
Ki Man Kang ◽  
Min Joo Park ◽  
Joon Seop Kwak ◽  
Hyun Soo Kim ◽  
Kwang Woo Kwon ◽  
...  

2011 ◽  
Vol 20 (03) ◽  
pp. 521-525 ◽  
Author(s):  
WENTING HOU ◽  
THEERADETCH DETCHPROHM ◽  
CHRISTIAN WETZEL

Low-resistance Ohmic contacts are essential for the fabrication of electrical devices. While low contact resistance has been achieved to p -type layers or n -type layers separately, contacts are likely to degrade when both types need to be integrated into a single fabrication process, in particular when prior mesa etching is required. We present a solution to the problem, resulting in low-resistance Ohmic contacts on n -type GaN layers without post-deposition thermal anneal, while maintaining the quality of typical p -type contacts. We implement an integrated process for both, n - and p -contacts, involving an oxygen pretreatment to fabricate light emitting diodes with lower series resistance in the contacts and lower voltage drop at high current when compared to separately optimized contacts.


2010 ◽  
Vol 97 (9) ◽  
pp. 092103 ◽  
Author(s):  
Joon-Woo Jeon ◽  
Seong-Han Park ◽  
Se-Yeon Jung ◽  
Sang Youl Lee ◽  
Jihyung Moon ◽  
...  

2004 ◽  
Vol 16 (6) ◽  
pp. 1450-1452 ◽  
Author(s):  
J.-O. Song ◽  
D.-S. Leem ◽  
J.S. Kwak ◽  
O.H. Nam ◽  
Y. Park ◽  
...  

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