Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model
2019 ◽
Vol 37
(6)
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pp. 062921
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2000 ◽
Vol 30
(1)
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pp. 574-579
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Keyword(s):
2009 ◽
Vol 7
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pp. 409-412
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2016 ◽
Vol 851
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pp. 199-204
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2015 ◽
Vol 39
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pp. 735-741
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