Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry

Thin Solid Films ◽

10.1016/s0040-6090(98)01586-7 ◽

1999 ◽

Vol 343-344 ◽

pp. 295-298 ◽

Author(s):

D. Franta ◽

I. Ohlídal ◽

D. Munzar ◽

J. Hora ◽

K. Navrátil ◽

...

Keyword(s):

Amorphous Silicon ◽

Spectroscopic Ellipsometry ◽

Hydrogenated Amorphous Silicon ◽

Optical Characterization ◽

Spectroscopic Reflectometry ◽

Hydrogenated Amorphous

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Optical Characterization of Very Thin Hydrogenated Amorphous Silicon Films Using Spectroscopic Ellipsometry

Japanese Journal of Applied Physics ◽

10.1143/jjap.30.l1914 ◽

1991 ◽

Vol 30 (Part 2, No. 11B) ◽

pp. L1914-L1916 ◽

Author(s):

Tadashi Saitoh ◽

Nobuyasu Hori ◽

Katsuyuki Suzuki ◽

Shigeo Iida

Keyword(s):

Amorphous Silicon ◽

Spectroscopic Ellipsometry ◽

Hydrogenated Amorphous Silicon ◽

Optical Characterization ◽

Silicon Films ◽

Hydrogenated Amorphous

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Optical characterization of hydrogenated amorphous silicon thin films deposited at high rate

Journal of Electronic Materials ◽

10.1007/s11664-999-0140-9 ◽

1999 ◽

Vol 28 (12) ◽

pp. 1452-1456 ◽

Author(s):

S. H. Lin ◽

Y. C. Chan ◽

D. P. Webb ◽

Y. W. Lam

Keyword(s):

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Optical Characterization ◽

High Rate ◽

Silicon Thin Films ◽

Hydrogenated Amorphous

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Spectroscopic Ellipsometry Characterization of Hydrogenated Amorphous Silicon Thin Film

Acta Optica Sinica ◽

10.3788/aos201333.1031001 ◽

2013 ◽

Vol 33 (10) ◽

pp. 1031001

Author(s):

何剑 He Jian ◽

李伟 Li Wei ◽

徐睿 Xu Rui ◽

郭安然 Guo Anran ◽

祁康成 Qi Kangcheng ◽

...

Keyword(s):

Thin Film ◽

Amorphous Silicon ◽

Spectroscopic Ellipsometry ◽

Hydrogenated Amorphous Silicon ◽

Silicon Thin Film ◽

Hydrogenated Amorphous

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Fast Optical Characterization of Microvoid Size in Hydrogenated Amorphous Silicon: Study on the Universal Applicability of the Correlation between the Microvoid Size and the Optical Constant

2018 25th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) ◽

10.23919/am-fpd.2018.8437445 ◽

2018 ◽

Author(s):

Nobuyuki Matsuki ◽

Takuya Matsui ◽

Koji Michishio ◽

Brian E. O'Rourke ◽

Nagayasu Oshima ◽

...

Keyword(s):

Amorphous Silicon ◽

Optical Constant ◽

Hydrogenated Amorphous Silicon ◽

Optical Characterization ◽

Universal Applicability ◽

Hydrogenated Amorphous

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Real time spectroscopic ellipsometry study of hydrogenated amorphous silicon p‐i‐n solar cells: Characterization of microstructural evolution and optical gaps

Applied Physics Letters ◽

10.1063/1.114287 ◽

1995 ◽

Vol 67 (18) ◽

pp. 2669-2671 ◽

Author(s):

Joohyun Koh ◽

Yiwei Lu ◽

Sangbo Kim ◽

J. S. Burnham ◽

C. R. Wronski ◽

...

Keyword(s):

Solar Cells ◽

Amorphous Silicon ◽

Real Time ◽

Microstructural Evolution ◽

Spectroscopic Ellipsometry ◽

Hydrogenated Amorphous Silicon ◽

Hydrogenated Amorphous

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The characterization of hydrogenated amorphous silicon and epitaxial silicon thin films grown on crystalline silicon substrates by using spectroscopic ellipsometry

Acta Physica Sinica ◽

10.7498/aps.61.157803 ◽

2012 ◽

Vol 61 (15) ◽

pp. 157803

Author(s):

Wu Chen-Yang ◽

Gu Jin-Hua ◽

Feng Ya-Yang ◽

Xue Yuan ◽

Lu Jing-Xiao

Keyword(s):

Amorphous Silicon ◽

Spectroscopic Ellipsometry ◽

Crystalline Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Substrates ◽

Epitaxial Silicon ◽

Silicon Thin Films ◽

Hydrogenated Amorphous

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Characterization of pulsed laser deposited hydrogenated amorphous silicon films by spectroscopic ellipsometry

Thin Solid Films ◽

10.1016/j.tsf.2010.12.173 ◽

2011 ◽

Vol 519 (9) ◽

pp. 2855-2858 ◽

Author(s):

István Hanyecz ◽

Judit Budai ◽

Edit Szilágyi ◽

Zsolt Tóth

Keyword(s):

Amorphous Silicon ◽

Spectroscopic Ellipsometry ◽

Hydrogenated Amorphous Silicon ◽

Pulsed Laser ◽

Silicon Films ◽

Hydrogenated Amorphous

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Characterization of microvoids in thin hydrogenated amorphous silicon layers by spectroscopic ellipsometry and Fourier transform infrared spectroscopy

Scripta Materialia ◽

10.1016/j.scriptamat.2015.05.018 ◽

2015 ◽

Vol 107 ◽

pp. 50-53 ◽

Author(s):

Wenzhu Liu ◽

Liping Zhang ◽

Fanying Meng ◽

Wanwu Guo ◽

Jian Bao ◽

...

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Amorphous Silicon ◽

Fourier Transform Infrared Spectroscopy ◽

Spectroscopic Ellipsometry ◽

Hydrogenated Amorphous Silicon ◽

Fourier Transform Infrared ◽

Hydrogenated Amorphous

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Characterization of hydrogenated amorphous silicon carbide films

10.1117/12.57018 ◽

1992 ◽

Author(s):

S. Uthanna

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Hydrogenated Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Hydrogenated Amorphous

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Fabrication and characterization of hydrogenated amorphous silicon films, CVD diamond films, and their devices

10.31274/rtd-180813-12799 ◽

1994 ◽

Author(s):

Hao Jia

Keyword(s):

Amorphous Silicon ◽

Diamond Films ◽

Hydrogenated Amorphous Silicon ◽

Cvd Diamond ◽

Silicon Films ◽

Fabrication And Characterization ◽

Hydrogenated Amorphous

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