Summary Abstract: Thin film thickness measurement using x‐ray peak ratioing in the scanning electron microscope

1982 ◽  
Vol 20 (4) ◽  
pp. 1372-1373 ◽  
Author(s):  
N. E. Elliott ◽  
W. E. Anderson ◽  
T. A. Archuleta ◽  
D. M. Stupin
Keyword(s):  
Thin Film ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Film Thickness ◽  
Thickness Measurement ◽  
Thin Film Thickness ◽  
X Ray ◽  
Film Thickness Measurement ◽  
Scanning Electron

Preparation of Standards for Thin Film Thickness Measurements by Energy Dispersive X-ray Analysis

1981 ◽  
Vol 35 (3) ◽  
pp. 324-328 ◽  
Author(s):  
G. W. Kammlott
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Energy Dispersive ◽  
Thin Film Thickness ◽  
X Ray ◽  
Direct Measurements ◽  
Thickness Measurements ◽  
Scanning Electron

Thin film measurements by energy dispersive x-ray analysis require appropriate standards. A method for preparing such standards by deposition of thin films and direct measurements of their thickness with a scanning electron microscope is described. These standards have been used to measure thickness of corrosion layers to within ±8.0 nm accuracy.

Functionality of ZnPc Thin Film Deposited on Polystyrene Interlayer for Immobilization of Biomolecules in QCM Based Biosensor

2015 ◽  
Vol 827 ◽  
pp. 266-270 ◽  
Author(s):  
D.J. Djoko H. Santjojo ◽  
Masruroh ◽  
Sri Widyarti ◽  
Fadli Robiandi
Keyword(s):  
Thin Film ◽  
Surface Roughness ◽  
Electron Microscope ◽  
Bovine Serum Albumin ◽  
Scanning Electron Microscope ◽  
Film Thickness ◽  
Quartz Crystal ◽  
Thermal Evaporation ◽  
Complex Adsorption ◽  
Scanning Electron

Functionality of zinc pthalocyanine (ZnPc) thin film for immobilization of biomolecules was studied using bovine serum albumin (BSA). The functionality is affected by microstructures and surface roughness of the film. This studies is conducted by producing ZnPc films by means of thermal evaporation in vacuum. The ZnPc films were deposited on quartz crystal substrates with a polystyrene interlayer. Observations were carried out using a scanning electron microscope and an optical micro-profilometry. Enhancement of the functionality is observed with the increase of the film thickness. Surface roughness and microstructures of the film influence the functionality in a complex way. Adsorbtion of the BSA molecules is associated with both the surface roughness and microstructures. Although generally the adsorption is proportional to the contact area but the roughness and fibrous microstructures of the deposited ZnPc produce complex adsorption and trapping mechanisms in the immobilization of the BSA.

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