Study on electromagnetron for plasma polymerization. II. Magnetic field enhanced radio frequency plasma deposition of organogermanium films from tetraethylgermanium
1994 ◽
Vol 12
(2)
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pp. 345-353
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1997 ◽
Vol 101
(18)
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pp. 3614-3619
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2009 ◽
Vol 80
(5)
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pp. 053508
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2021 ◽
Vol 32
(9)
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