Influence of magnetic field on the self‐bias potential on a radio frequency‐powered electrode in radio frequency plasma

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pp. 672-675 ◽  
Author(s):  
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S. Tabuchi ◽  
T. Banno ◽  
A. Kinbara ◽  
Y. Nakagawa ◽  
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Vol 1923 (1) ◽  
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