Influence of magnetic field on the self‐bias potential on a radio frequency‐powered electrode in radio frequency plasma
1993 ◽
Vol 11
(3)
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pp. 672-675
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Keyword(s):
The Self
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Keyword(s):
2009 ◽
Vol 80
(5)
◽
pp. 053508
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1994 ◽
Vol 12
(2)
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pp. 345-353
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Keyword(s):
Keyword(s):
Keyword(s):
2019 ◽
Vol 1147
◽
pp. 012131
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1998 ◽
Vol 16
(4)
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pp. 2162-2172
◽
2021 ◽
Vol 1923
(1)
◽
pp. 012020