Computational modeling of reactive gas modulation in radio frequency reactive sputtering

1996 ◽  
Vol 14 (4) ◽  
pp. 2231-2234 ◽  
Author(s):  
Hidetoshi Sekiguchi ◽  
Takashi Murakami ◽  
Atsushi Kanzawa ◽  
Takahiro Imai ◽  
Takuya Honda
Keyword(s):  
Computational Modeling ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Reactive Gas

Deposition of magnesium hydride thin films using radio frequency reactive sputtering

2011 ◽  
Vol 519 (18) ◽  
pp. 5949-5954 ◽  
Author(s):  
C. Platzer-Björkman ◽  
T. Mongstad ◽  
J.P. Mæhlen ◽  
A. Baldi ◽  
S. Karazhanov ◽  
...  
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Magnesium Hydride

scholarly journals Tin nitride thin films prepared by radio‐frequency reactive sputtering

1995 ◽  
Vol 77 (12) ◽  
pp. 6641-6645 ◽  
Author(s):  
Toshiro Maruyama ◽  
Tomonori Morishita
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Tin Nitride

scholarly journals The nitrogen concentration effect on Ce doped SiOxNy emission: towards optimized Ce3+ for LED applications

Nanoscale ◽  
2018 ◽  
Vol 10 (8) ◽  
pp. 3823-3837 ◽  
Author(s):  
F. Ehré ◽  
C. Labbé ◽  
C. Dufour ◽  
W. M. Jadwisienczak ◽  
J. Weimmerskirch-Aubatin ◽  
...  
Keyword(s):  
Nitrogen Concentration ◽  
Reactive Sputtering ◽  
Concentration Effect ◽  
Gas Atmosphere ◽  
Reactive Gas

Ce-Doped SiOxNy films are deposited by magnetron reactive sputtering from a CeO2 target under a nitrogen reactive gas atmosphere.

Structural and photoluminescent properties of ZnO films deposited by radio frequency reactive sputtering

2007 ◽  
Vol 50 (3) ◽  
pp. 281-286 ◽  
Author(s):  
XingPing Peng ◽  
ZhiGuang Wang ◽  
Yin Song ◽  
Tao Ji ◽  
Hang Zang ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Reactive Sputtering ◽  
Zno Films

Effect of reactive gas mass flow on the composition and structure of AIN films deposited by reactive sputtering

1993 ◽  
Vol 230 (2) ◽  
pp. 121-127 ◽  
Author(s):  
E.J.-Bienk ◽  
H. Jensen ◽  
G.N. Pedersen ◽  
G. Sørensen
Keyword(s):  
Mass Flow ◽  
Reactive Sputtering ◽  
Composition And Structure ◽  
Reactive Gas

scholarly journals Copper nitride thin films prepared by radio‐frequency reactive sputtering

1995 ◽  
Vol 78 (6) ◽  
pp. 4104-4107 ◽  
Author(s):  
Toshiro Maruyama ◽  
Tomonori Morishita
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Reactive Sputtering ◽  
Copper Nitride

Impact of Radio Frequency Powers on GaInN Film Growth by Magnetron Reactive Sputtering

2012 ◽  
Vol 51 (11R) ◽  
pp. 118004 ◽  
Author(s):  
Qixin Guo ◽  
Wangzhou Shi ◽  
Feng Liu ◽  
Tomoya Nakao ◽  
Katsuhiko Saito ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Film Growth ◽  
Reactive Sputtering
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