Characterization of carbon and carbon nitride thin films using time-of-flight secondary-ion-mass spectrometry

1997 ◽  
Vol 15 (4) ◽  
pp. 2196-2201 ◽  
Author(s):  
L. J. Huang ◽  
Y. Hung ◽  
S. Chang ◽  
G. R. Massoumi ◽  
W. N. Lennard ◽  
...  
2001 ◽  
Vol 31 (8) ◽  
pp. 724-733 ◽  
Author(s):  
Caren D. Tidwell ◽  
David G. Castner ◽  
Stephen L. Golledge ◽  
Buddy D. Ratner ◽  
Klaus Meyer ◽  
...  

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