Electron transport to a substrate in a radio frequency capacitively coupled plasma by the Boltzmann equation

1998 ◽  
Vol 16 (1) ◽  
pp. 294-299 ◽  
Author(s):  
Jun Matsui ◽  
Mari Shibata ◽  
Nobuhiko Nakano ◽  
Toshiaki Makabe
Keyword(s):  
Boltzmann Equation ◽  
Electron Transport ◽  
Radio Frequency ◽  
Capacitively Coupled ◽  
The Boltzmann Equation ◽  
Capacitively Coupled Plasma

Rotation of Particles Trapped in the Sheath of a Radio-Frequency Capacitively Coupled Plasma

2004 ◽  
Vol 32 (2) ◽  
pp. 601-606 ◽  
Author(s):  
G.V. Paeva ◽  
R.P. Dahiya ◽  
G.M.W. Kroesen ◽  
W.W. Stoffels
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Analytic solutions to the Boltzmann equation for electron transport in silicon

1991 ◽  
Vol 43 (8) ◽  
pp. 6581-6589 ◽  
Author(s):  
L. R. Logan ◽  
H. H. K. Tang ◽  
G. R. Srinivasan
Keyword(s):  
Boltzmann Equation ◽  
Electron Transport ◽  
Analytic Solutions ◽  
The Boltzmann Equation
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