Silicon nitride thin films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition
1999 ◽
Vol 17
(2)
◽
pp. 433-444
◽
2005 ◽
Vol 23
(1)
◽
pp. 168
◽
2000 ◽
Vol 379
(1-2)
◽
pp. 259-264
◽
1997 ◽
Vol 15
(6)
◽
pp. 2682
◽
1997 ◽
Vol 36
(Part 2, No. 2B)
◽
pp. L223-L226
◽
2002 ◽
Vol 235
(1-4)
◽
pp. 333-339
◽