End-point detection and etch-rate measurement during reactive-ion etching using fluorescent polymer films

1983 ◽  
Vol 1 (2) ◽  
pp. 501 ◽  
Author(s):  
Paul Kolodner
Keyword(s):  
Polymer Films ◽  
Etch Rate ◽  
Reactive Ion Etching ◽  
Rate Measurement ◽  
Ion Etching ◽  
End Point ◽  
End Point Detection ◽  
Fluorescent Polymer ◽  
Point Detection

End-point Detection of Reactive Ion Etching by Plasma Impedance Monitoring

2001 ◽  
Vol 40 (Part 1, No. 3A) ◽  
pp. 1457-1462 ◽  
Author(s):  
Masaaki Kanoh ◽  
Masashi Yamage ◽  
Hiroyuki Takada
Keyword(s):  
Reactive Ion Etching ◽  
Ion Etching ◽  
End Point ◽  
Plasma Impedance ◽  
Impedance Monitoring ◽  
End Point Detection ◽  
Point Detection

End Point Detection for Reactive Ion Etching of Aluminum

1984 ◽  
Vol 131 (1) ◽  
pp. 214-215 ◽  
Author(s):  
Kwang O. Park ◽  
Fredrick C. Rock
Keyword(s):  
Reactive Ion Etching ◽  
Ion Etching ◽  
End Point ◽  
End Point Detection ◽  
Point Detection

Reactive-Ion-Etching of 100nm Linewidth Tungsten Features Using SF6:H2 and a Cr-Liftoff Mask

1993 ◽  
Vol 324 ◽  
Author(s):  
Loretita M. Shirey ◽  
Kelly W. Foster ◽  
William Chu ◽  
John Kosakowski ◽  
Kee Woo Rhee ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Reactive Ion Etching ◽  
Processing Parameters ◽  
Critical Parameters ◽  
Ion Etching ◽  
Novel Method ◽  
End Point Detection ◽  
Sidewall Passivation ◽  
Gas Dilution ◽  
Point Detection

AbstractReactive ion etching of features down to 100 nm in linewidth in tungsten has been studied using an SF6 based chemistry. The studies were carried out in a PlasmaTherm 500 etcher operated at low pressure (2 mTorr) and power (100 mWatts/cm2). Key processing parameters have been identified to achieve the resolution and aspect ratio required for high contrast x-ray masks. The critical parameters include sample temperature, gas dilution and end point detection. However, even with all of these parameters optimized, additional sidewall passivation is required to obtain the necessary 6.5:1 aspect ratio. A novel method of achieving such passivation based on an intermittent etching process is described.

scholarly journals Acid number, viscosity and end-point detection in a multiphase high temperature polymerisation process using an online miniaturised MEMS Fabry-Pérot interferometer

Talanta ◽  
2021 ◽  
Vol 224 ◽  
pp. 121735
Author(s):  
Claudio Avila ◽  
Christos Mantzaridis ◽  
Joan Ferré ◽  
Rodrigo Rocha de Oliveira ◽  
Uula Kantojärvi ◽  
...  
Keyword(s):  
High Temperature ◽  
Acid Number ◽  
End Point ◽  
Fabry Perot ◽  
End Point Detection ◽  
Point Detection

Fluoroimmunoassay for human choriomammotropin.

1979 ◽  
Vol 25 (6) ◽  
pp. 973-975 ◽  
Author(s):  
T Chard ◽  
A Sykes
Keyword(s):  
Equipment Design ◽  
Radiation Hazard ◽  
Human Origin ◽  
End Point ◽  
End Point Detection ◽  
Purified Antigen ◽  
Point Detection

Abstract We describe an immunoassay for human choriomammo-tropin by use of the fluorescein-labeled hormone (of human origin). The technique is generally similar to the radioimmunoassay for this material, but has the advantage of stability of tracer and avoidance of radiation hazard. However, the procedure requires approximately 50-fold more tracer than does the radioimmunoassay, and this would be a disadvantage with materials for which supplies of purified antigen are scarce. Furthermore, both within-assay variation (3.9%) and between-assay variation (7.8--7.9%) were less satisfactory than that of radioimmunoassay (1.5% and 2.2--3%, respectively). This is almost certainly the result of imprecision of end-point detection and could probably be corrected by further attention to equipment design.

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