Limitation of low-temperature low-pressure chemical vapor deposition of SiO2 for the insulation of high-density multilevel metal very large scale integrated circuits
1989 ◽
Vol 7
(2)
◽
pp. 229
◽
Keyword(s):
1986 ◽
Vol 133
(8)
◽
pp. 1701-1705
◽
Keyword(s):
Keyword(s):
2008 ◽
Vol 254
(19)
◽
pp. 6086-6089
◽
Keyword(s):
1986 ◽
Vol 133
(8)
◽
pp. 1691-1697
◽
Keyword(s):
Keyword(s):
1993 ◽
Vol 126
(2-3)
◽
pp. 285-292
◽
1986 ◽
Vol 133
(8)
◽
pp. 1697-1701
◽
Keyword(s):
Keyword(s):
2006 ◽
Vol 24
(3)
◽
pp. 467-473
◽
Keyword(s):
Keyword(s):