Optical properties of hydrogenated amorphous-carbon film for attenuated phase-shift mask applications
1993 ◽
Vol 11
(6)
◽
pp. 2697
◽
2001 ◽
Vol 184
(2)
◽
pp. R4-R5
◽
2015 ◽
Vol 163
(3)
◽
pp. E54-E61
◽