Atomic nitrogen production in a molecular-beam epitaxy compatible electron cyclotron resonance plasma source
1994 ◽
Vol 12
(2)
◽
pp. 1232
◽
1990 ◽
Vol 61
(9)
◽
pp. 2407-2411
◽
1996 ◽
Vol 14
(4)
◽
pp. 2655-2658
◽
2002 ◽
Vol 89
(1-3)
◽
pp. 296-302
◽
1995 ◽
Vol 24
(9)
◽
pp. 1201-1206
◽
1998 ◽
Vol 37
(Part 2, No. 6B)
◽
pp. L700-L702
◽
2003 ◽
Vol 0
(7)
◽
pp. 2802-2805
◽