Cu metallization using a permanent magnet electron cyclotron resonance microwave plasma/sputtering hybrid system

1996 ◽  
Vol 14 (3) ◽  
pp. 1853 ◽  
Author(s):  
S. M. Gorbatkin
Keyword(s):  
Permanent Magnet ◽  
Hybrid System ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Microwave Plasma ◽  
Electron Cyclotron ◽  
Cu Metallization ◽  
Plasma Sputtering ◽  
Resonance Microwave

Preparation of As-Grown BiPbSrCaCuO Thin Films by Electron-Cyclotron-Resonance Microwave Plasma Sputtering

1989 ◽  
Vol 28 (Part 2, No. 7) ◽  
pp. L1220-L1222 ◽  
Author(s):  
Yasuhiro Nishimori ◽  
Shoichiro Minomo ◽  
Michio Taniguchi ◽  
Masato Sugiyo ◽  
Yoshito Fukumoto ◽  
...  
Keyword(s):  
Thin Films ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Microwave Plasma ◽  
Electron Cyclotron ◽  
Plasma Sputtering ◽  
Resonance Microwave

Electron-Cyclotron-Resonance Microwave Plasma Oxidation of Er1Ba2Cu3OySuperconductive Ceramics

1988 ◽  
Vol 27 (Part 2, No. 3) ◽  
pp. L411-L413 ◽  
Author(s):  
Shoichiro Minomo ◽  
Michio Taniguchi ◽  
Yuji Ishida ◽  
Masato Sugiyo ◽  
Tetsuro Takahashi ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Microwave Plasma ◽  
Electron Cyclotron ◽  
Plasma Oxidation ◽  
Resonance Microwave
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