Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate

2021 ◽  
Vol 39 (5) ◽  
pp. 052406
Author(s):  
Pauline Dill ◽  
Florian Pachel ◽  
Christian Militzer ◽  
Alexander Held ◽  
Georg Puchas ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Atomic Layer Deposition ◽  
Furfuryl Alcohol ◽  
Atomic Layer ◽  
Titanium Phosphate ◽  
Silicon Carbide Fibers ◽  
Layer Deposition

scholarly journals Luminescent properties of europium titanium phosphate thin films deposited by atomic layer deposition

RSC Advances ◽  
2017 ◽  
Vol 7 (13) ◽  
pp. 8051-8059 ◽  
Author(s):  
Michael N. Getz ◽  
Per-Anders Hansen ◽  
Helmer Fjellvåg ◽  
Ola Nilsen
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Structural Characterization ◽  
Atomic Layer ◽  
Luminescent Properties ◽  
Titanium Phosphate ◽  
The Novel ◽  
Layer Deposition ◽  
Novel Material

Optical and structural characterization of luminescent thin films of the novel material europium titanium phosphate, deposited by atomic layer deposition.

Atomic Layer Deposition of Titanium Phosphate from Titanium Tetrachloride and Triethyl Phosphate onto Carbon Fibers

2018 ◽  
Vol 5 (16) ◽  
pp. 1800423 ◽  
Author(s):  
Christian Militzer ◽  
Julia Buchsbaum ◽  
Volodymyr Dzhagan ◽  
Dietrich R. T. Zahn ◽  
Harm Wulff ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Carbon Fibers ◽  
Titanium Tetrachloride ◽  
Atomic Layer ◽  
Titanium Phosphate ◽  
Triethyl Phosphate ◽  
Layer Deposition

scholarly journals Seed‐Layer‐Free Atomic Layer Deposition of Highly Uniform Al 2 O 3 Thin Films onto Monolayer Epitaxial Graphene on Silicon Carbide

2019 ◽  
Vol 6 (10) ◽  
pp. 1900097 ◽  
Author(s):  
Emanuela Schilirò ◽  
Raffaella Lo Nigro ◽  
Fabrizio Roccaforte ◽  
Ioannis Deretzis ◽  
Antonino La Magna ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Atomic Layer Deposition ◽  
Seed Layer ◽  
Atomic Layer ◽  
Epitaxial Graphene ◽  
Layer Deposition ◽  
Highly Uniform ◽  
Seed Layer Free

scholarly journals Nanostructured mullite steam oxidation resistant coatings for silicon carbide deposited via atomic layer deposition

2018 ◽  
Vol 101 (6) ◽  
pp. 2493-2505 ◽  
Author(s):  
Amanda L. Hoskins ◽  
Aidan H. Coffey ◽  
Charles B. Musgrave ◽  
Alan W. Weimer
Keyword(s):  
Silicon Carbide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Steam Oxidation ◽  
Layer Deposition ◽  
Oxidation Resistant

MOCVD Compatible Atomic Layer Deposition Process of Al2O3 on SiC and Graphene/SiC Heterostructures

2018 ◽  
Vol 924 ◽  
pp. 506-510
Author(s):  
Marco Eckstein ◽  
Christian Koppka ◽  
Sebastian Thiele ◽  
Yan Mi ◽  
Rui Xu ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Atomic Layer Deposition ◽  
Aluminium Oxide ◽  
Atomic Layer ◽  
Deposition Process ◽  
Oxide Layers ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition ◽  
High K ◽  
Silicon Silicon

Aluminium oxide was deposited on silicon, silicon carbide and epitaxial graphene grown on silicon carbide by atomic layer deposition using a standard MOCVD equipment. The morphology and the electrical properties of the aluminium oxide layers on both substrates were determined and compared to aluminium oxide layers deposited with a standard atomic layer deposition equipment. The high-k material fabricated with the developed MOCVD process show comparable or better properties compared to the standard atomic layer deposition process.

Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries

2017 ◽  
Vol 5 (1) ◽  
pp. 330-338 ◽  
Author(s):  
Thomas Dobbelaere ◽  
Felix Mattelaer ◽  
Amit Kumar Roy ◽  
Philippe Vereecken ◽  
Christophe Detavernier
Keyword(s):  
Atomic Layer Deposition ◽  
Lithium Ion Batteries ◽  
Lithium Ion ◽  
Atomic Layer ◽  
Titanium Phosphate ◽  
Lithium Ions ◽  
Layer Deposition ◽  
Electrochemically Active

The as-deposited PE-ALD titanium phosphate was electrochemically active, showing insertion/extraction of lithium ions around a potential of 2.7 V vs. Li/Li+.

Atomic layer deposition of titanium phosphate on silica nanoparticles

2012 ◽  
Vol 30 (1) ◽  
pp. 01A134 ◽  
Author(s):  
Monika K. Wiedmann ◽  
David H. K. Jackson ◽  
Yomaira J. Pagan-Torres ◽  
Eunkyung Cho ◽  
James A. Dumesic ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Silica Nanoparticles ◽  
Atomic Layer ◽  
Titanium Phosphate ◽  
Layer Deposition
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