Magnetron co-sputtered μm-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices

Andrey V. Starodubov; Alexey A. Serdobintsev; Viktor V. Galushka; Ilya O. Kozhevnikov; Anton M. Pavlov; Giacomo Ulisse; Viktor Krozer; Nikita M. Ryskin

doi:10.1116/6.0001552

Magnetron co-sputtered μm-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001552 ◽

2022 ◽

Vol 40 (1) ◽

pp. 014201

Author(s):

Andrey V. Starodubov ◽

Alexey A. Serdobintsev ◽

Viktor V. Galushka ◽

Ilya O. Kozhevnikov ◽

Anton M. Pavlov ◽

...

Keyword(s):

Structural Material ◽

High Power ◽

Cu Films ◽

Microelectronic Devices ◽

Vacuum Microelectronic

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Microstructural Effects on the Interfacial Adhesion of Nanometer-Thick Cu Films on Glass Substrates: Implications for Microelectronic Devices

ACS Applied Nano Materials ◽

10.1021/acsanm.0c02182 ◽

2020 ◽

Author(s):

Alice Lassnig ◽

Velislava L. Terziyska ◽

Jakub Zalesak ◽

Tanja Jörg ◽

Daniel M. Toebbens ◽

...

Keyword(s):

Interfacial Adhesion ◽

Cu Films ◽

Glass Substrates ◽

Microelectronic Devices ◽

Microstructural Effects

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11.5: A MEMS-based vacuum gauge for measuring pressure and out-gassing rates in miniaturized vacuum microelectronic devices

International Vacuum Nanoelectronics Conference ◽

10.1109/ivnc.2010.5563229 ◽

2010 ◽

Cited By ~ 4

Author(s):

Julie Chang ◽

Nithya Jayapratha ◽

Rade Kuljic ◽

Benjamin Salvador ◽

Matthew Cantwell ◽

...

Keyword(s):

Vacuum Gauge ◽

Microelectronic Devices ◽

Vacuum Microelectronic

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Processing of vacuum microelectronic devices by focused ion and electron beams

Applied Physics A ◽

10.1007/s00339-002-1941-3 ◽

2003 ◽

Vol 76 (7) ◽

pp. 1007-1012 ◽

Cited By ~ 6

Author(s):

M. Takai ◽

W. Jarupoonphol ◽

C. Ochiai ◽

O. Yavas ◽

Y.K. Park

Keyword(s):

Electron Beams ◽

Microelectronic Devices ◽

Vacuum Microelectronic

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Highly uniform and stable electron field emission from B-doped Si-tip arrays for applications in integrated vacuum microelectronic devices

25th International Vacuum Nanoelectronics Conference ◽

10.1109/ivnc.2012.6316857 ◽

2012 ◽

Cited By ~ 1

Author(s):

R. Schreiner ◽

C. Prommesberger ◽

C. Langer ◽

F. Dams ◽

P. Serbun ◽

...

Keyword(s):

Field Emission ◽

Electron Field Emission ◽

Microelectronic Devices ◽

Electron Field ◽

Vacuum Microelectronic ◽

Highly Uniform

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High field insulation relevant to vacuum microelectronic devices

IEEE Transactions on Dielectrics and Electrical Insulation ◽

10.1109/94.993738 ◽

2002 ◽

Vol 9 (2) ◽

pp. 216-225 ◽

Cited By ~ 4

Author(s):

T.S. Sudarshan ◽

Xianyun Ma ◽

P.G. Muzykov

Keyword(s):

High Field ◽

Microelectronic Devices ◽

Vacuum Microelectronic

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Work Function Of Field Emitter In Vacuum Microelectronic Devices Decreased By Its Geometrical Configuration

[Proceedings] IVMC '93 Sixth International Vacuum Microelectronics Conference ◽

10.1109/ivmc.1993.700275 ◽

2005 ◽

Author(s):

Luo Enze ◽

Liu Yunpeng ◽

Zheng Maosheng ◽

Chen Lujun ◽

Liu Weidong

Keyword(s):

Work Function ◽

Geometrical Configuration ◽

Field Emitter ◽

Microelectronic Devices ◽

Vacuum Microelectronic

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The physics of vacuum microelectronic devices

IEEE Transactions on Electron Devices ◽

10.1109/16.43690 ◽

1989 ◽

Vol 36 (11) ◽

pp. 2599 ◽

Cited By ~ 4

Author(s):

H.F. Gray

Keyword(s):

Microelectronic Devices ◽

Vacuum Microelectronic

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Planar-processed tungsten and polysilicon vacuum microelectronic devices with integral cavity sealing

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586848 ◽

1993 ◽

Vol 11 (2) ◽

pp. 493 ◽

Cited By ~ 19

Author(s):

Q. Mei

Keyword(s):

Microelectronic Devices ◽

Vacuum Microelectronic

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Eliminating proximity effects and improving transmission in field emission vacuum microelectronic devices for integrated circuits

2015 IEEE International Electron Devices Meeting (IEDM) ◽

10.1109/iedm.2015.7409819 ◽

2015 ◽

Author(s):

Erich J. Radauscher ◽

Kristin H. Gilchrist ◽

Shane T. Di Dona ◽

Zach E. Russell ◽

Jeffrey R. Piascik ◽

...

Keyword(s):

Integrated Circuits ◽

Field Emission ◽

Proximity Effects ◽

Microelectronic Devices ◽

Vacuum Microelectronic

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Synthesis of Al4C3 nanowalls via thermal evaporation and potential application in vacuum microelectronic devices as cold electron emitters

CrystEngComm ◽

10.1039/c2ce25705j ◽

2012 ◽

Vol 14 (23) ◽

pp. 7951 ◽

Cited By ~ 7

Author(s):

Y. Sun ◽

H. Cui ◽

L. Gong ◽

J. Chen ◽

C. X. Wang

Keyword(s):

Potential Application ◽

Thermal Evaporation ◽

Cold Electron ◽

Microelectronic Devices ◽

Vacuum Microelectronic ◽

Electron Emitters

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