Investigation of precision grinding process for production of silicon diaphragms

For micro-positioning systems using piezoelectric actuators for precision grinding process control, sinusoidal command signals will be used and will give additional problems in comparison with the commonly used step signals due to the hysteresis effects, which require a good modeling approach. In order to avoid the discontinuity problem in obtaining the values of the piezoelectric constant, a new approach of direct mapping with polynomial fit is proposed. Theoretical and experimental studies are conducted and comparative studies are made. Compared with the single polynomial approach, the proposed method of direct mapping with polynomial fit is able to reduce the modeling error to 12.5%, which is 6.5% lower, and the problems in obtaining the values of the piezoelectric constant are avoided. The proposed approach is shown advantageous. Further studies are necessary to significantly reduce the modeling error.

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A study of the ultra precision grinding process on a magnetic disk substrate—development of new bonding materials for fixed abrasives of grinding stone

Wear ◽

10.1016/0043-1648(95)06792-2 ◽

1996 ◽

Vol 195 (1-2) ◽

pp. 74-80 ◽

Cited By ~ 12

Author(s):

Y. Tomita ◽

H. Eda

Keyword(s):

Grinding Process ◽

Precision Grinding ◽

Magnetic Disk ◽

Ultra Precision ◽

Grinding Stone ◽

Disk Substrate

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Modeling of Micro-Positioning System Using Direct Mapping and Polynomial Fit for Precision Grinding Process Control

Advances in Abrasive Technology IX - Key Engineering Materials ◽

10.4028/0-87849-416-2.791 ◽

2007 ◽

pp. 791-796

Author(s):

S. Tse ◽

Y. Gao

Keyword(s):

Process Control ◽

Grinding Process ◽

Positioning System ◽

Precision Grinding ◽

Direct Mapping ◽

Polynomial Fit

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Investigation into the Role of Cold Atmospheric Plasma on the Precision Grinding of RB-SiC Ceramic at Room Temperature

10.21203/rs.3.rs-1106967/v1 ◽

2021 ◽

Author(s):

Jiabin Xu ◽

Xiaoshuang Rao ◽

Xiaoyu Xu ◽

Kechong Wang ◽

Bao Guo ◽

...

Keyword(s):

Surface Modification ◽

Material Removal ◽

Room Temperature ◽

Atmospheric Plasma ◽

Grinding Process ◽

Plasma Oxidation ◽

Precision Grinding ◽

Cold Atmospheric Plasma ◽

Sic Ceramic ◽

Subsurface Material

Abstract RB-SiC ceramic is one of the most important and useful material as optical precision elements in many scientific research fields. In this paper, a novel cold atmospheric plasma (CAP), which is based on the precision grinding process in surface technology to modify at room temperature (RT) for grinding with a combination of plasma oxidation surface modification is proposed. To identify the performance of the proposed cold atmospheric plasma (CAP) method on the surface modification of RB-SiC ceramic, precision grinding test was conducted. To reveal the fundamental issue in the grinding of RB-SiC ceramic, numerical calculation and model analysis were conducted to investigate the effect of the composite process on grinding forces and the mechanism of subsurface material removal in the presence of plasma oxidation. As a result of the method included the kept constant during the precision grinding of the composite process self-adaption-grinding process to avoid the deviation caused by second grinding particle entry. As a summary, we provides a significant cold atmospheric plasma-precision grinding compound process toward the establishment of the basic theory by analyzing the mechanism of the simulated design and computation. The process and technical difficulties of RB-SiC ceramic and mechanism of subsurface material removal during precision grinding were be solved.

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Structural Analysis of an Orbital Grinding System for Grinding Crankshafts for 5ton 5m Class Ship Engines

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.625.253 ◽

2014 ◽

Vol 625 ◽

pp. 253-257

Author(s):

June Jang ◽

Byoung Yeol Choi ◽

Han Seok Bang ◽

Woo Chun Choi ◽

Soon Joo Cho

Keyword(s):

Structural Analysis ◽

High Precision ◽

3D Modeling ◽

Fem Simulation ◽

Grinding Process ◽

Precision Grinding ◽

Commercial Software ◽

Grinding System

An orbital grinding system is developed for manufacturing high precision crankshafts for 5ton-5m class ship engines. Structural analysis is carried out by 3D modeling and FEM simulation using a commercial software. The grinding system can conduct high precision grinding process for crankshafts of ship engines as well as normal small crankshafts.

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