New parametric point spread function calibration methodology for improving the accuracy of patterning prediction in electron-beam lithography

2012 ◽  
Vol 11 (1) ◽  
pp. 013009 ◽  
Author(s):  
Chun-Hung Liu
Keyword(s):  
Electron Beam ◽  
Point Spread Function ◽  
Electron Beam Lithography ◽  
Point Spread ◽  
Spread Function

Determining the Resolution Limits of Electron-Beam Lithography: Direct Measurement of the Point-Spread Function

Nano Letters ◽  
2014 ◽  
Vol 14 (8) ◽  
pp. 4406-4412 ◽  
Author(s):  
Vitor R. Manfrinato ◽  
Jianguo Wen ◽  
Lihua Zhang ◽  
Yujia Yang ◽  
Richard G. Hobbs ◽  
...  
Keyword(s):  
Electron Beam ◽  
Direct Measurement ◽  
Point Spread Function ◽  
Electron Beam Lithography ◽  
Point Spread ◽  
Spread Function ◽  
Resolution Limits

scholarly journals Measurement of the Electron Beam Point Spread Function (PSF) in a Scanning Electron Microscope (SEM)

2015 ◽  
Vol 21 (S3) ◽  
pp. 699-700 ◽  
Author(s):  
Yudhishthir P. Kandel ◽  
Matthew D. Zotta ◽  
Andrew N. Caferra ◽  
Richard Moore ◽  
Eric Lifshin
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Point Spread Function ◽  
Point Spread ◽  
Spread Function ◽  
Scanning Electron
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