Optimization of electron beam patterned hydrogen silsesquioxane mask edge roughness for low-loss silicon waveguides

2014 ◽  
Vol 8 (1) ◽  
pp. 083098 ◽  
Author(s):  
Michael G. Wood ◽  
Li Chen ◽  
Justin R. Burr ◽  
Ronald M. Reano
Keyword(s):  
Electron Beam ◽  
Hydrogen Silsesquioxane ◽  
Low Loss ◽  
Silicon Waveguides ◽  
Edge Roughness ◽  
Mask Edge

scholarly journals Etch-free low loss silicon waveguides using hydrogen silsesquioxane oxidation masks

2011 ◽  
Vol 19 (20) ◽  
pp. 18827 ◽  
Author(s):  
Maziar P. Nezhad ◽  
Olesya Bondarenko ◽  
Mercedeh Khajavikhan ◽  
Aleksandar Simic ◽  
Yeshaiahu Fainman
Keyword(s):  
Hydrogen Silsesquioxane ◽  
Low Loss ◽  
Silicon Waveguides

Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist

2008 ◽  
Vol 44 (2) ◽  
pp. 115 ◽  
Author(s):  
M. Gnan ◽  
S. Thoms ◽  
D.S. Macintyre ◽  
R.M. De La Rue ◽  
M. Sorel
Keyword(s):  
Electron Beam ◽  
Silicon On Insulator ◽  
Hydrogen Silsesquioxane ◽  
Low Loss ◽  
Photonic Wires

Low loss optical interconnects to silicon waveguides

2006 ◽  
Author(s):  
Ariela Donval ◽  
Ram Oron ◽  
Moshe Oron ◽  
A. N. M. Masu Choudhury ◽  
Tom R. Stanczyk ◽  
...  
Keyword(s):  
Optical Interconnects ◽  
Low Loss ◽  
Silicon Waveguides

scholarly journals Low-Loss Studies on Metallic and Insulating Nanostructures Using a Monochromatic Electron Beam

2011 ◽  
Vol 17 (S2) ◽  
pp. 768-769 ◽  
Author(s):  
R Arenal
Keyword(s):  
Electron Beam ◽  
Low Loss

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Demonstration of low-loss electron beam transport and mm-wave experiments of the fusion-FEM

1998 ◽  
pp. 327-331
Author(s):  
W.H. Urbanus ◽  
W.A. Bongers ◽  
G. van Dijk ◽  
C.A.J. van der Geer ◽  
R. de Kruif ◽  
...  
Keyword(s):  
Electron Beam ◽  
Beam Transport ◽  
Low Loss ◽  
Electron Beam Transport

scholarly journals Laser crystallized low-loss polycrystalline silicon waveguides

2019 ◽  
Vol 27 (4) ◽  
pp. 4462 ◽  
Author(s):  
Yohann Franz ◽  
Antoine F. J. Runge ◽  
Swe Z. Oo ◽  
Gregorio Jimenez-Martinez ◽  
Noel Healy ◽  
...  
Keyword(s):  
Polycrystalline Silicon ◽  
Low Loss ◽  
Silicon Waveguides
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