KrF excimer laser etching of diamondlike carbon films

1992 ◽  
Author(s):  
Taras V. Kononenko ◽  
Vitali I. Konov ◽  
Victor G. Ralchenko ◽  
V. E. Strelnitsky
Keyword(s):  
Excimer Laser ◽  
Carbon Films ◽  
Laser Etching ◽  
Diamondlike Carbon ◽  
Krf Excimer Laser

Excimer laser etching of diamond-like carbon films: spalling effect

1995 ◽  
Vol 86 (1-4) ◽  
pp. 234-238 ◽  
Author(s):  
T.V. Kononenko ◽  
V.G. Ralchenko ◽  
E.D. Obraztsova ◽  
V.I. Konov ◽  
Jayshree Seth ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Laser Etching

Deposition of diamondlike carbon films using XeCl excimer laser

1997 ◽  
Author(s):  
Mao-Kuo Wei ◽  
Robert Queitsch ◽  
Adolf Lang ◽  
Karsten Schutte ◽  
Hans W. Bergmann
Keyword(s):  
Excimer Laser ◽  
Carbon Films ◽  
Diamondlike Carbon ◽  
Xecl Excimer Laser

The ablation threshold in amorphous diamondlike carbon films exposed to an ArF excimer laser radiation

2000 ◽  
Vol 26 (12) ◽  
pp. 1032-1033
Author(s):  
N. A. Kaliteevskaya ◽  
O. I. Kon’kov ◽  
E. I. Terukov ◽  
R. P. Seisyan
Keyword(s):  
Laser Radiation ◽  
Excimer Laser ◽  
Ablation Threshold ◽  
Carbon Films ◽  
Diamondlike Carbon ◽  
Excimer Laser Radiation ◽  
Arf Excimer Laser

Surface roughness of gallium nitride with volcano-like protrusions formed by KrF excimer laser etching

2010 ◽  
Author(s):  
Shui-Jinn Wang ◽  
Wei-Chi Lee ◽  
Kai-Ming Uang ◽  
Tron-Min Chen ◽  
Der-Ming Kuo ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Gallium Nitride ◽  
Excimer Laser ◽  
Laser Etching ◽  
Krf Excimer Laser
Sign in / Sign up

Export Citation Format

Share Document