Surface roughness of gallium nitride with volcano-like protrusions formed by KrF excimer laser etching

2010 ◽  
Author(s):  
Shui-Jinn Wang ◽  
Wei-Chi Lee ◽  
Kai-Ming Uang ◽  
Tron-Min Chen ◽  
Der-Ming Kuo ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Gallium Nitride ◽  
Excimer Laser ◽  
Laser Etching ◽  
Krf Excimer Laser

KrF excimer laser etching of diamondlike carbon films

1992 ◽  
Author(s):  
Taras V. Kononenko ◽  
Vitali I. Konov ◽  
Victor G. Ralchenko ◽  
V. E. Strelnitsky
Keyword(s):  
Excimer Laser ◽  
Carbon Films ◽  
Laser Etching ◽  
Diamondlike Carbon ◽  
Krf Excimer Laser

Changes in surface roughness and work function of indium-tin-oxide due to KrF excimer laser irradiation

2005 ◽  
Vol 23 (5) ◽  
pp. 1305-1308 ◽  
Author(s):  
Yow-Jon Lin ◽  
Iain D. Baikie ◽  
Wei-Yang Chou ◽  
Shih-Ting Lin ◽  
Hsing-Cheng Chang ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Work Function ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Excimer Laser Irradiation ◽  
Krf Excimer Laser

Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth

1989 ◽  
Vol 28 (Part 1, No. 11) ◽  
pp. 2354-2356
Author(s):  
Yasuhiro Shimada ◽  
Koichi Wani ◽  
Yoshiro Ogata
Keyword(s):  
Excimer Laser ◽  
Wavelength Stabilization ◽  
Krf Excimer Laser ◽  
Pressure Controlled

Preparation of boron carbide thin film by pulsed KrF excimer laser deposition process

2002 ◽  
Vol 407 (1-2) ◽  
pp. 126-131 ◽  
Author(s):  
Shin-ichi Aoqui ◽  
Hisatomo Miyata ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara
Keyword(s):  
Thin Film ◽  
Boron Carbide ◽  
Excimer Laser ◽  
Deposition Process ◽  
Laser Deposition ◽  
Krf Excimer Laser

An Advanced KrF Excimer Laser Stepper For Production Of 16MDRAMs

1988 ◽  
Author(s):  
Hideo Nakagawa ◽  
Masaru Sasago ◽  
Masayuki Endo ◽  
Yushihiko Hirai ◽  
Kazufumi Ogawa ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Krf Excimer Laser

Single pulse vibrational Raman scattering by a broadband KrF excimer laser in a hydrogen–air flame

1990 ◽  
Vol 29 (15) ◽  
pp. 2325 ◽  
Author(s):  
Robert W. Pitz ◽  
Joseph A. Wehrmeyer ◽  
J. M. Bowling ◽  
Tsarng-Sheng Cheng
Keyword(s):  
Raman Scattering ◽  
Excimer Laser ◽  
Single Pulse ◽  
Krf Excimer Laser

Experimental study of excimer formation kinetics in a discharge-pumped KrF excimer laser

1994 ◽  
Vol 105 (1-2) ◽  
pp. 133-141 ◽  
Author(s):  
H. Yoshida ◽  
K. Nakamura ◽  
H. Ninomiya ◽  
S. Horiguchi
Keyword(s):  
Experimental Study ◽  
Excimer Laser ◽  
Formation Kinetics ◽  
Excimer Formation ◽  
Krf Excimer Laser
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