Laser-enhanced CVD for low-temperature Si epitaxy
1991 ◽
Vol 30
(Part 1, No. 5)
◽
pp. 893-896
◽
Keyword(s):
1999 ◽
Vol 38
(Part 1, No. 4B)
◽
pp. 2415-2418
◽
Keyword(s):
2001 ◽
Vol 395
(1-2)
◽
pp. 225-229
◽
Keyword(s):
2004 ◽
Vol 270
(3-4)
◽
pp. 396-401
◽