Investigation of Growth Mechanism and Role of H2 in Very Low Temperature
Si Epitaxy
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1991 ◽
Vol 30
(Part 1, No. 5)
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pp. 893-896
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1999 ◽
Vol 38
(Part 1, No. 4B)
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pp. 2415-2418
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2001 ◽
Vol 395
(1-2)
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pp. 225-229
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